Duplexer filter having film bulk acoustic resonator and semiconductor package thereof
An acoustic resonator and semiconductor technology, applied in the direction of impedance network, electrical components, etc., can solve problems such as the difficulty of expanding the electrode 14 and reducing the bonding performance
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[0047] The examples listed in the drawings are now referred to in detail as the preferred embodiments of the present invention.
[0048] In the following, refer to Figure 3A to Figure 10B , It will be explained that the thin film cavity acoustic resonator with good adhesion to the semiconductor bottom layer and good piezoelectric layer performance can be formed by connecting several thin film cavity acoustic resonators in series and parallel to filter the transmitting / receiving frequency The thin film cavity acoustic filter of the specific frequency band and the necessary peripheral passive components are integrated into a semiconductor chip to miniaturize the duplexer, and the semiconductor suitable for the duplex filter or the miniaturization of the duplex filter Package.
[0049] Figure 3A It is a cross-sectional view of the thin film cavity acoustic resonator according to the first embodiment of the present invention.
[0050] As shown in the figure, the thin-film cavity ac...
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