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Switchable terahertz wave beam regulation and control device based on VO2 and preparation method thereof

A VO2 and device technology, which is applied in the field of terahertz devices, can solve the problems of single terahertz wave modulation function and cannot be actively switched, and achieve the effect of mature technology, high-speed function switching, and avoiding difficult processing

Pending Publication Date: 2022-07-15
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

[0006] Aiming at the problem that the function of terahertz wave modulation is single and cannot be switched actively in the prior art

Method used

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  • Switchable terahertz wave beam regulation and control device based on VO2 and preparation method thereof
  • Switchable terahertz wave beam regulation and control device based on VO2 and preparation method thereof
  • Switchable terahertz wave beam regulation and control device based on VO2 and preparation method thereof

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Embodiment 1

[0035] like figure 1 , figure 2As shown, in this embodiment, the terahertz beam steering device includes a bottom tunable grating structure 1, a substrate 2, and a phase modulation structure 3 formed on the substrate. The phase modulation structure 3 includes a plurality of arrayed Phase modulation unit structure 4, each phase modulation unit structure 4 is an SRR structure with different opening sizes; the bottom tunable grating structure 1 includes VO 2 Rectangular grid 101 and metal grid 102.

[0036] like figure 2 The opening direction of each phase modulation unit structure 4 (SRR structure) shown is deflected along the x-axis ±45°, and the bottom tunable grating structure 1 is a metal grating 102 and VO 2 The rectangular grids 101 are staggered and are respectively metal gratings 102 and VO with a length X / (2*K) (ie 26.67um) width X (160um) 2 A rectangular grid 101 is formed, and K=3 in this embodiment.

[0037] In this embodiment, the substrate 2 is quartz, and i...

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Abstract

The invention discloses a VO2-based switchable terahertz wave beam regulation and control device and a preparation method thereof, and belongs to the technical field of terahertz devices. Comprising a bottom-layer adjustable grating structure, a substrate and a phase modulation array structure arranged on the substrate, the phase modulation array structure is composed of a plurality of phase modulation unit structures arranged in an array mode, and each phase modulation unit structure is an SRR structure with the opening direction being + / -45 degrees relative to the X axis. Unit structures with different phases are arranged in an array form according to a phase calculation formula, VO2 is embedded in the back surfaces of the units, control over abnormal refraction of dual-frequency-band and dual-space terahertz waves is achieved, when VO2 is in a metal state, abnormal refraction is achieved at a low frequency band and on the front surface of a metasurface, and the performance of the metasurface is improved. And when VO2 is in a transmission state, abnormal refraction is realized at a high frequency band and on the back surface of the metasurface, so that abnormal refraction control of dual-frequency dual-space terahertz waves is realized.

Description

technical field [0001] The invention belongs to the technical field of terahertz devices, and in particular relates to a VO2-based switchable terahertz beam control device and a preparation method thereof. Background technique [0002] The frequency band of terahertz waves is located in the transition region of microwave and far-infrared, with a range of 0.1THz to 10THz, a wavelength range of 3000 to 30μm, and an energy of 0.4 to 40meV. Compared with other frequency bands, its electromagnetic characteristics are special, with high frequency and relatively high bandwidth. It has the advantages of wide, strong transmission ability, and rich information. At present, with the development of social science and technology, people's exploration of terahertz waves has become more and more in-depth, and the realization of miniaturization and multi-functionality of terahertz devices has also become the goal pursued by researchers. [0003] In recent years, terahertz metamaterial quas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/00G02F1/01G02B27/42
CPCG02F1/0054G02F1/009G02F1/0147G02F1/01G02B27/4283G02B27/4261
Inventor 曾泓鑫王诗琪丛宣张雅鑫龚森王兰杨梓强
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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