MEMS capacitive sensor and preparation method thereof

A capacitive sensor and sensitive capacitance technology, which is applied in the fluid pressure measurement, instrument, and measurement force using capacitance changes, can solve the problems of low detection accuracy, poor linearity, easy overload, etc., to increase the area, improve the sensitivity and measurement. Accuracy, reducing the effect of excessive center deformation

Active Publication Date: 2022-07-15
QINGDAO GOERTEK INTELLIGENT SENSOR CO LTD
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  • Abstract
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Problems solved by technology

[0004] In view of the above problems, the object of the present invention is to provide a MEMS capacitive sensor and its preparation method, which have solved the problems of poor linearity, easy overload and low detection accuracy in the existing flat capacitive sensors.

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  • MEMS capacitive sensor and preparation method thereof
  • MEMS capacitive sensor and preparation method thereof
  • MEMS capacitive sensor and preparation method thereof

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Embodiment Construction

[0024] In the following description, for the purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It will be apparent, however, that the embodiments may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", " Rear, Left, Right, Vertical, Horizontal, Top, Bottom, Inner, Outer, Clockwise, Counterclockwise, Axial, The orientations or positional relationships indicated by "radial direction", "circumferential direction", etc. are based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present ...

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Abstract

The invention provides an MEMS capacitive sensor and a preparation method thereof, the sensor comprises at least one sensitive capacitor, and the sensitive capacitor comprises a lower comb tooth part and an upper insertion tooth part fixed on the lower comb tooth part; wherein the upper gear shaping part comprises a first pole plate and a second pole plate which are in point connection and arranged in parallel, and gear shaping is arranged on the side, away from the first pole plate, of the second pole plate; the lower comb tooth part comprises a base plate and comb teeth arranged on the base plate, and the insertion teeth and the comb teeth are arranged in a crossed and spaced mode. The whole capacitor area can be effectively increased, and the problem of overlarge deformation of the center of the polar plate is solved.

Description

technical field [0001] The invention relates to the technical field of microelectronics manufacturing, and more particularly, to a MEMS capacitive sensor and a preparation method. Background technique [0002] At present, the design of mainstream MEMS capacitive pressure sensors mostly adopts the plate capacitance method, and the sensitive capacitance is formed by the upper and lower plates. When the test pressure acts on the surface of the plates, it will cause the plates to deform, thereby changing the distance between the upper and lower plates. , the trigger capacitance changes linearly. [0003] However, in the above-mentioned flat capacitive pressure sensor, when the same pressure acts on the plate and the deformation occurs, there will be a certain difference between the deformation of the central part of the plate and the deformation of the surrounding parts, that is, the design principle of the MEMS capacitive pressure sensor is simple, because its own principle ch...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14G01L9/12
CPCG01L1/142G01L9/12
Inventor 朱恩成陈磊张强王栋杰胡洪
Owner QINGDAO GOERTEK INTELLIGENT SENSOR CO LTD
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