MOEMS acceleration sensor system based on orthogonal carrier modulation

Abstract

The MOEMS acceleration sensor system based on orthogonal carrier modulation provided by the invention solves the problem that the output signal of the MOEMS acceleration sensor system is influenced by the fluctuation of the phase difference between the laser carrier signal and the reference signal in the analog demodulation process, improves the signal detection precision, and is wide in application range. The voltage driving signal unit is used for outputting two paths of direct-current bias sinusoidal voltage signals with the phase difference of 90 degrees; the LD driving current control unit is used for converting the corresponding two paths of direct-current bias sinusoidal voltage signals into direct-current bias sinusoidal current signals with the phase difference of 90 degrees and outputting the direct-current bias sinusoidal current signals; the laser output unit is used for outputting two paths of laser signals corresponding to the two paths of direct-current bias sinusoidal current signals to the MEMS chip; and the optical signal processing loop is used for converting the two paths of laser signals carrying acceleration information after passing through the MEMS chip into two paths of electric signals, demodulating the two paths of electric signals to obtain two paths of demodulated signals, carrying out algorithm processing and outputting acceleration signals.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems (MEMS) sensors, in particular to an MOEMS acceleration sensor system based on quadrature carrier modulation. Background technique [0002] The integrated MOEMS acceleration sensor integrates MEMS sensitive chips, laser chips, photodiodes and other components in a micro-housing, which solves the problems of performance, volume, cost and practicability of the optical fiber MEMS acceleration sensor, and has a wide application prospect. , light weight, wide wavelength range, high reliability, and direct modulation are widely used as light sources for integrated MOEMS acceleration sensors. However, compared with He-Ne lasers, semiconductor lasers also have poor temperature characteristics and poor output light. Disadvantages such as divergence and high noise. In particular, the relative light intensity noise introduced by the semiconductor laser accounts for a large proportion...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems existing in the prior art, the present invention provides a MOEMS acceleration sensor system based on quadrature carrier modulation, which solves the problem that the fluctuation of the phase difference between the laser carrier signal and the reference signal affects the output signal of the MOEMS sensor system during the analog demodulation process , improve the signal detection accuracy, and at the same time have a wide range of applications

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