PSD-based plate flatness detection system
A detection system and flatness technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems of low precision, waste of manpower, low work efficiency, etc., and achieve high detection accuracy, low configuration cost, and high detection efficiency Effect
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[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments of the present invention belong to the protection scope of the present invention.
[0024] According to an embodiment of the present invention, a PSD-based plate flatness detection system is provided.
[0025] Such as Figure 1-Figure 2 As shown, the PSD-based plate flatness detection system according to the embodiment of the present invention includes: a detection component 1 arranged on the top of the workpiece to be measured, and the detection component 1 includes: a laser source 11, a condenser lens 12, an imaging lens 13 and PSD 14, of which;
[0026] The laser source...
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