Test device

Abstract

The invention provides test equipment. The test equipment comprises a base and a preheating unit arranged on the base, the preheating unit comprises a gas generator, a blocking mechanism and a heating device. The gas generator is used for discharging air towards the base to form an air wall. The blocking mechanism is located above the air wall and forms a heat preservation space with the air wall. The heating device is arranged in the heat preservation space.

Description

technical field [0001] The invention relates to a testing device, in particular to a testing device with an air wall. Background technique [0002] Generally speaking, chips are often put into testing equipment, such as a handler (handler), to perform a final test (Final Test, FT) on the chip, and preheating must be performed in advance according to the test temperature conditions before testing. Furthermore, since the test equipment is preheated in an open environment, the heat is easily dissipated and cannot achieve a good temperature stability of the preheated chip. [0003] However, some tests (such as electrical tests) are more sensitive to temperature, which will easily affect the test results when the temperature stability is not good, so it will also be reflected in the yield performance. Contents of the invention [0004] The present invention is directed to a testing device, which can achieve a better temperature stability of the preheated chip, thereby improvin...

AI Technical Summary

Problems solved by technology

Furthermore, since the test equipment is preheated in an open environment, the heat is more likely to dissipate and cannot achieve a better temperature stability for the preheated chip

[0003] However, some tests (such as electrical tests) are more sensitive to temperature, which will easily affect the test results when the temperature stability is not good, so it will also be reflected in the yield performance

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