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Visual line source crucible device and material monitoring method thereof

A crucible and line source technology, applied in the field of OLED, can solve the problems of inability to meet the use requirements, reduce the purity, and the device parameters are not up to standard, and achieve the effect of reducing yield loss, improving deficiencies, and avoiding a large number of backflows.

Pending Publication Date: 2022-04-12
FUJIAN HUAJIACAI CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The quality of the organic material directly determines the effect of the device. If the temperature control is not good or the vacuum environment of the cavity is not good, the material will be cracked when it is overheated for a long time, or it will be oxidized and reduce the purity when exposed to water and oxygen. In the end, the parameters of the device are not up to standard and cannot meet the needs of use.

Method used

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  • Visual line source crucible device and material monitoring method thereof
  • Visual line source crucible device and material monitoring method thereof
  • Visual line source crucible device and material monitoring method thereof

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Embodiment Construction

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0024] Such as Figure 1-2 As shown, it is an existing line source crucible, including a crucible upper cover 5 and a crucible base 7, and the material is Ti. The crucible upper cover 5 and the crucible base 7 are fixed by the second bolt 2 and the buckle 1, and the first graphite gasket 6 plays a good role in cushioning and sealing, and this material can meet the 200-400 ℃ high temperature.

[0025] The organic material 4 is sublimated or vaporized under hi...

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Abstract

The invention discloses a visual line source crucible device and a material monitoring method thereof.The visual line source crucible device comprises a crucible base, a crucible upper cover is installed at the upper end of the crucible base through a locking mechanism, and a left transparent window, a right transparent window and a front transparent window are installed on the left side, the right side and the front face of the crucible base through first bolts correspondingly; second graphite gaskets are arranged at the contact parts between the left transparent window, the right transparent window and the front transparent window and the crucible base; the left transparent window, the right transparent window and the front transparent window are respectively and correspondingly matched with the CCD lenses, and real-time photographing confirmation is achieved through the three corresponding CCD lenses, so that the purposes of visualization and real-time monitoring are achieved; the problem that a certain number of products are wasted due to the fact that the performance of the products is not found in time if the materials are cracked or oxidized in the using process in the existing manufacturing process can be solved, and the yield loss is reduced.

Description

technical field [0001] The invention belongs to the technical field of OLEDs, and in particular relates to a visualized line source crucible device and a material monitoring method thereof. Background technique [0002] OLED (Organic Light-Emitting Diode) is an electroluminescent device, mainly used in the manufacture of OLED displays. OLED can be divided into passive drive (PMOLED) and active drive (AMOLED) according to different driving methods. PMOLED has a relatively simple structure and high driving voltage, and is suitable for use on low-resolution panels, such as wristbands and smart watches. AMOLED technology is relatively complex, the driving voltage is low, and the life of the light-emitting element is long. It is suitable for high-resolution panels, such as mobile phones, TVs, computers, tablets, VR equipment, and vehicle displays. AMOLED is currently the mainstream technology for OLED screens. [0003] Evaporation is the key process in AMOLED. Through high tem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/54C23C14/12H01L51/56
Inventor 林志斌林泽
Owner FUJIAN HUAJIACAI CO LTD
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