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Flexible piezoresistive sensor based on porous microstructure and preparation method thereof

A microstructure and piezoresistive technology, which is applied in the measurement of the property force of piezoresistive materials, etc., can solve the problem of less sensitivity of the conductive path, and achieve the effects of low cost, improved conductive path and reduced cost.

Pending Publication Date: 2022-01-25
ANHUI UNIVERSITY
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Problems solved by technology

[0003] There are two types of existing flexible piezoresistive sensors. One is to use a surface microstructure (conical, pyramidal, hemispherical). By depositing a conductive layer on the surface, the contact area between the electrode and the surface changes when the force is applied. This structure often only has high sensitivity under low pressure, and it is easy to saturate when the pressure is too high; the other is to make a conductive matrix and form a porous structure inside the matrix. When the pressure is applied, the pores inside the conductive matrix are deformed, causing resistance. change, less conductive path at low pressure due to porosity confinement less sensitive

Method used

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  • Flexible piezoresistive sensor based on porous microstructure and preparation method thereof
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  • Flexible piezoresistive sensor based on porous microstructure and preparation method thereof

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Embodiment Construction

[0027] The present invention will be further described below in conjunction with accompanying drawing:

[0028] Such as Figure 1-Figure 2 A flexible piezoresistive sensor based on a porous microstructure shown includes a flexible substrate 1 and an interdigital electrode 4 arranged below the flexible substrate 1; the upper surface of the flexible substrate 1 is a plane, and the lower surface is provided with several directions A protruding microstructure 3; several micropores 2 are opened on the flexible base 1.

[0029] Further, the flexible substrate adopts PDMS (polydimethylsiloxane), curing agent, conductive filler and PET powder (polyethylene terephthalate) according to 10:1:a:(0.8~1.2) It is prepared by mixing the ratio of a, wherein, the value range of a is 1-1.5.

[0030] Further, the conductive filler is any one or a combination of carbon black, graphene, and carbon nanotubes.

[0031] Further, a part of the microstructure is in contact with the top of the interdi...

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Abstract

The invention relates to a flexible piezoresistive sensor based on a porous microstructure and a preparation method thereof. The flexible piezoresistive sensor comprises a flexible substrate and an interdigital electrode arranged under the flexible substrate; the upper surface of the flexible substrate is a plane, and the lower surface of the flexible substrate is provided with a plurality of downwards-protruding microstructures; and a plurality of micropores are formed in the flexible substrate. According to the technical scheme, the flexible piezoresistive sensor has good pressure sensitivity, is suitable for detecting human pulse, throat pronunciation and pressure signals of other parts, and has the advantages of being high in sensitivity, low in cost, simple in process, suitable for mass production and the like.

Description

technical field [0001] The invention relates to the technical field of piezoresistive sensors, in particular to a flexible piezoresistive sensor based on a porous microstructure and a preparation method thereof. Background technique [0002] With the rapid development of society and economy and the improvement of people's living standards, more and more people pay great attention to health care issues. With the development of flexible electronic technology, some health data of the human body can be monitored anytime and anywhere by using wearable electronic skin. Traditional sensors mostly use metal and semiconductor devices, which are not suitable for daily wear by the human body and have poor adaptability. The flexible sensor has good biocompatibility, which makes it wearable and real-time monitoring, and has broad prospects in the fields of human-computer interaction, electronic skin and bionic devices. [0003] There are two types of existing flexible piezoresistive se...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/18
CPCG01L1/18
Inventor 张阳阳张晓鹏李莉萍赵吉
Owner ANHUI UNIVERSITY
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