On-chip integrated ranging chip
A technology of chip and light detection, which is applied in the field of laser detection, can solve the problems of large size and achieve the effect of small size, easy large-scale integration and high integration
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Embodiment 1
[0039] see figure 1 , the present embodiment provides an on-chip integrated ranging chip, including: a semiconductor substrate 1; a laser emitting element 2 arranged on one side surface of the semiconductor substrate 1, a detection and reception diffraction structure 3 and an analysis module 4, the The detection and receiving diffraction structure 3 is adapted to receive the laser signal output by the laser emitting part 2, emit the laser signal to the target object, and receive the laser signal reflected by the target object, and the analysis module 4 is adapted to obtain the laser signal time-of-flight and calculate the distance of the target object according to the time-of-flight.
[0040] In the above-mentioned on-chip integrated distance measuring chip, the laser signal emitted by the laser emitting part 2, the detection and receiving diffraction structure 3 receives the laser signal output by the laser emitting part 2 and then emits the laser signal to the target object,...
Embodiment 2
[0053] see figure 2 , this embodiment provides an on-chip integrated ranging chip, which differs from the on-chip integrated ranging chip provided in Embodiment 1 in that:
[0054] The detection and reception diffraction structure 3' includes a transmission diffraction unit 31 and a reception diffraction unit 32 spaced apart from each other, the transmission diffraction unit 31 is connected to the output end of the detection light transmission member 6, and the transmission diffraction unit 31 is suitable for sending The target emits the laser signal, the receiving diffraction unit 32 is connected to the input end of the echo transmission member 8 , and the receiving diffraction unit 32 is adapted to receive the laser signal reflected by the target. The detecting and receiving diffraction structure 3' separates the emission and reception of the laser signal, so that the emission and reception of the laser signal do not affect each other, so the emission and reception of the l...
Embodiment 3
[0058] see image 3, the present embodiment provides an on-chip integrated ranging chip, including: a semiconductor substrate 1; a laser emitting element 2 arranged on one side surface of the semiconductor substrate 1, a detection and reception diffraction structure 3 and an analysis module 4, the The detection and receiving diffraction structure 3 is adapted to receive the laser signal output by the laser emitting part 2, emit the laser signal to the target object, and receive the laser signal reflected by the target object, and the analysis module 4 is adapted to obtain the laser signal time-of-flight and calculate the distance of the target object according to the time-of-flight.
[0059] In this embodiment, the material of the semiconductor substrate 1 includes, but is not limited to, III-V group semiconductor materials and silicon-based materials. In this embodiment, the laser emitting element 2 and the analysis module 4 are respectively fixed on the surface of the semic...
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