Front-end filtering device of vacuum pump

Abstract

The invention relates to the technical field of photovoltaic coating equipment, and discloses a front-end filtering device of a vacuum pump. The front-end filtering device of the vacuum pump comprises a filtering box, and a heating assembly, a cooling assembly and a filtering assembly which are arranged in the filtering box, wherein a water inlet, an air inlet and an air outlet which are mutually communicated are formed in the filtering box, the water inlet is formed in the bottom of the filtering box and used for being communicated with a water source, the air inlet is formed in the side wall of the filtering box, the air outlet is formed in the upper portion of the filtering box and used for being communicated with a vacuum pump, the heating assembly, the cooling assembly and the filtering assembly are sequentially arranged between the air inlet and the air outlet from bottom to top, the heating assembly can heat water to atomize the water, a cooling liquid is arranged in the cooling assembly, and tail gas can be sequentially subjected to water mist thermal reaction by the heating assembly, condensed by the cooling assembly to remove impurities, filtered by the filtering assembly, subjected to gas-liquid separation and then input into the vacuum pump. The vacuum pump front-end filtering device can guarantee the effective operation environment of the vacuum pump and reduce the maintenance cost of the vacuum pump.

Description

technical field [0001] The invention relates to the technical field of photovoltaic coating equipment, in particular to a filter device at the front end of a vacuum pump. Background technique [0002] Tubular PECVD equipment is one of the main equipment for coating equipment in the photovoltaic industry. With the emergence of the alumina plating process, the conversion efficiency of solar cells has improved, and the demand for alumina equipment is also increasing. However, during the use of alumina equipment, the remaining TMA gas after the process is pumped out by the vacuum pump. , a large amount of dust will be generated in the vacuum pipeline, and the vacuum pump will be blocked after repeated processes, resulting in serious blockage of the vacuum pump, and the maintenance cost of the vacuum pump is relatively high. Therefore, it is necessary to install a dust catcher at the front end of the vacuum pump. However, the existing dust catcher has an unsatisfactory treatment...

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Problems solved by technology

With the emergence of the alumina plating process, the conversion efficiency of solar cells has improved, and the demand for alumina equipment is also increasing. However, during the use of alumina equipment, due to the remaining TMA gas after the process is pumped out by the vacuum pump , a large amount of dust will be generated in the vacuum pipeline, and the vacuum pump will be blocked after repeated processes, resulting in serious blockage of the vacuum pump, and the maintenance cost of the vacuum pump is relatively high

Therefore, it is necessary to install a dust catcher at the front end of the vacuum pump. However, the existing dust catcher has an unsatisfactory treatment effect on the exhaust gas. The gas entering the vacuum pump still contains a lot of impurities. The pump stuck cycle is not long, and the production loss is still serious

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