Vertical distribution feedback surface emitting laser and preparation method thereof

Abstract

The embodiment of the invention discloses a vertical distribution feedback surface emitting laser and a preparation method thereof. The laser comprises a first cavity surface, a periodic distribution feedback structure and a second cavity surface; the periodic distributed feedback structure comprises a plurality of distributed feedback structures along a first direction, each distributed feedback structure comprises an oxide layer, an active region and a tunnel junction, the plurality of oxide layers are arranged to replace a second-order grating to adjust uniform distribution of light, the oxide layers are arranged to be high-impedance structures, the current flowing direction is controlled, the light emitting power is improved, and further, the period of the periodical distribution feedback structure is set to be integral multiples of the half-wavelength of the effective emergent wavelength of the vertical distribution feedback surface emitting laser, the emergent wavelength range of the laser is limited, the spectral line width is reduced, and the wavelength stability of the laser is improved. The technical problems that in the prior art, a laser is poor in wavelength stability, low in power density, complex in structure and difficult to achieve mass production and narrow linewidth application requirements are solved.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of semiconductor lasers, in particular to a vertical distribution feedback surface emitting laser and a manufacturing method thereof. Background technique [0002] Applications such as light detection and ranging, such as lidar, use infrared light to create an accurate three-dimensional map of the environment, a key technology in the development of autonomous vehicles. Combined with a radar and camera system, it acts as the car's vision, capturing its surroundings. [0003] So far, edge-emitting lasers have had deviations of up to 40nm in wavelength stability as the component temperature increases, causing the "vision" of the LiDAR system to be somewhat blurred. In order to solve this problem, a distributed feedback (Distributed Feedback Laser, DFB) laser or a distributed Bragg reflection cavity (DBR) laser is usually used. Both can achieve good wavelength stability, but their manufac...

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Problems solved by technology

[0004] In view of this, the embodiment of the present invention provides a vertical distribution feedback surface emitting laser and its preparation method, which solves the problem of poor wavelength stability, low power density, complex structure, difficulty in mass production and narrow line width in the prior art. Application Requirements Technical Questions

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