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Preparation method of combined gas guide graphite electrode and quartz crucible without inner surface bubble group

A graphite electrode and quartz crucible technology, which is applied in glass manufacturing equipment, electrical components, electric heating devices, etc., can solve problems such as crucible foreign matter falling into the quartz crucible, melting of the lower end of the quartz tube sheath, and defects in condensate bubble groups. , to avoid silica condensation, reduce oxidation consumption, and prolong life

Active Publication Date: 2021-12-03
ADVANCED QUARTZ MATERIAL (HANGZHOU) CO LTD
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  • Abstract
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AI Technical Summary

Problems solved by technology

This method can achieve no condensate on the one side of the graphite electrode facing the gas blowing tube, but the single side of the graphite electrode facing away from the gas blowing tube will still deposit more condensation and fall into the quartz crucible to cause bubble group defects
The second is to install a quartz tube sheath in the silica condensation area of ​​the graphite electrode. Using the same material as the silica vapor and the quartz sheath, it can be firmly attached to the quartz sheath without falling into the quartz crucible. When making a quartz crucible, in order to ensure a relatively uniform temperature, it is necessary to lower the position of the graphite electrode for melting. At this time, the lower end of the quartz tube sheath is easily melted and falls into the quartz crucible, causing the crucible to be scrapped.

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  • Preparation method of combined gas guide graphite electrode and quartz crucible without inner surface bubble group

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preparation example Construction

[0042] see figure 1 , the embodiment of the present invention also provides a method for preparing a quartz crucible without bubbles on the inner surface, using a combined gas-conducting graphite electrode, comprising the following steps:

[0043] Step 1, forming the quartz sand raw material into the inner wall of the graphite crucible to form a quartz crucible, installing a combined gas-conducting graphite electrode, and connecting the upper graphite electrode 10 and the lower graphite electrode 20;

[0044] Step 2: use the lower section graphite electrode 20 to strike the arc and heat the quartz crucible to melt the quartz crucible, and pass the protective gas into the axial air hole 12. The pressure of the protective gas is controlled at 0.2-0.7Mpa, so that The protective gas of the upper graphite electrode 10 passes through the inner wall side of the upper graphite electrode 10 to the outer wall side of the upper graphite electrode 10, and forms a 360 ° surrounding air flo...

Embodiment 1

[0049] Example 1: Taking the melting of a 32-inch quartz crucible as an example, three conventional graphite electrodes with a diameter of 65 mm are used for melting. After the melting is completed, the longitudinal length of the electrode head without silica vapor condensate is measured, and 50 sets of data are continuously measured. Take L from 50 sets of data min 85mm is used as the design length of the lower dense electrode. Combined gas-conducting graphite electrodes are used, the diameter of the upper graphite electrode 10 and the lower graphite electrode 20 is φ65mm, the length of the upper graphite electrode 10 is 600mm, the diameter of the axial pores 12 is φ12mm, and the through-hole porosity of the lower graphite electrode 20 is 30%~ 35%, the ash content of the upper graphite electrode 10 is 0.03%, the length of the lower graphite electrode 20 is 85mm, and the density of the lower graphite electrode 20 is 1.74g / cm 3 , the ash content of the lower graphite electrode...

Embodiment 2

[0051] Embodiment 2: Taking the melting of a 32-inch quartz crucible as an example, three conventional graphite electrodes with a diameter of 60 mm are used for melting. After the melting is completed, the longitudinal length of the electrode head without silica vapor condensate is measured, and 50 sets of data are continuously measured. Take L from 50 sets of data min 82mm is used as the design length of the lower dense electrode. Combined gas-conducting graphite electrodes are used, the diameter of the upper graphite electrode 10 and the lower graphite electrode 20 is φ60mm, the length of the upper graphite electrode 10 is 600mm, the diameter of the axial pores 12 is φ10mm, and the through-hole porosity of the lower graphite electrode 20 is 20%~ 30%, the ash content of the upper graphite electrode 10 is 0.03%, the length of the lower graphite electrode 20 is 82mm, and the density of the lower graphite electrode 20 is 1.74g / cm 3 , the ash content of the lower graphite electr...

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Abstract

A combined gas guide graphite electrode comprises an upper graphite electrode section and a lower graphite electrode section, a cylindrical connecting protrusion is arranged at the lower end of the upper graphite electrode section, a cylindrical connecting groove is formed in the upper end of the lower graphite electrode section, an external thread is arranged on the outer side of the cylindrical connecting protrusion, an internal thread is arranged on the inner side of the cylindrical connecting groove, the cylindrical connecting protrusion is in threaded connection with the cylindrical connecting groove, an axial air hole is formed in the upper end of the upper graphite electrode section, the axial air hole does not penetrate through the upper graphite electrode section, the density of the lower graphite electrode section is greater than 1.72 g / cm<3>, and the through porosity of the upper graphite electrode section is 20-35%. By adopting the two-section combined graphite electrode, the upper graphite electrode section adopts a high-purity and high-permeability graphite electrode, and the lower graphite electrode section adopts a high-purity and high-density graphite electrode, so that the problem of high cost caused by high replacement frequency of the lower graphite electrode section is solved, and the invention further provides a preparation method of the quartz crucible without the inner surface bubble group.

Description

technical field [0001] The invention relates to the technical field of quartz crucible production, in particular to a method for preparing a combined gas-conducting graphite electrode and a quartz crucible without inner surface bubble groups. Background technique [0002] Quartz crucible is usually an important accessory for Czochralski method (CZ method) to pull single crystal silicon rods. Quartz crucible plays an irreplaceable role as the carrier of silicon material and silicon liquid. [0003] The usual preparation method of the quartz crucible is to distribute the quartz sand evenly according to a certain thickness in the graphite crucible with a straight cylinder, a round bottom, and an R corner connecting the straight cylinder and the round bottom, and heat the quartz sand by energizing the graphite electrode to generate arc heat. At the same time, a quartz crucible is formed by pumping and depressurizing the quartz sand at a specific time by a vacuum pump. The prepa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B7/085C03B20/00
CPCH05B7/085C03B19/066
Inventor 王建军何玉鹏邓红李卫李常国
Owner ADVANCED QUARTZ MATERIAL (HANGZHOU) CO LTD
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