A kind of fast qcm humidity sensor and its application and preparation method of humidity sensor

A humidity sensor, a fast technology, applied in instruments, scientific instruments, coatings, etc., can solve problems affecting the diffusion of water molecules, limit applications, etc., achieve high Q value, improve repeatability and hysteresis, and shorten response time.

Active Publication Date: 2022-03-25
SOUTHWEST JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] At present, in the article "Enhanced humidity-sensing properties of novel graphene oxide / zinc oxide nanoparticles layered thin film QCM sensor", it is disclosed that the GO solution and ZnO solution are deposited on the QCM transducer by spraying method, and the nanocomposite film based on GO / ZnO is obtained. Compared with the pure GO-based sensor, the sensitivity of the QCM humidity sensor is significantly improved; however, GO fragments will agglomerate after drying, affecting the diffusion of water molecules in the humidity-sensitive film, which limits its application in real-time humidity detection. application

Method used

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  • A kind of fast qcm humidity sensor and its application and preparation method of humidity sensor
  • A kind of fast qcm humidity sensor and its application and preparation method of humidity sensor
  • A kind of fast qcm humidity sensor and its application and preparation method of humidity sensor

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Embodiment 1

[0036] A preparation method for a fast QCM humidity sensor, comprising the following steps:

[0037] Step 1: Dissolve 2.46g of ammonium molybdate and 4.55g of thiourea in 75ml of deionized water, and stir ultrasonically for 40 minutes; a uniform solution is obtained, and then the obtained solution is transferred to a high-temperature reactor, and passed through hydrothermal heating at 180°C reaction method for 12 hours, then naturally cooled to room temperature; washed with deionized water and / or absolute ethanol for 3 to 5 times, and finally centrifuged at 1500rpm for 10 minutes, and then collected molybdenum disulfide in a vacuum at 60°C drying in a drying oven to obtain molybdenum disulfide nanoflower powder for subsequent use;

[0038] Step 2: 1 mg of molybdenum disulfide powder, 1 mg of graphene oxide (diameter 1000 nm), fullererol powder 1 mg (particle size 20 nm) are ultrasonically dispersed in a mixed solution of 1 ml deionized water and ethanol to obtain a molybdenum ...

Embodiment 2

[0050] A preparation method for a fast QCM humidity sensor, comprising the following steps:

[0051] Step 1: Dissolve 2g of ammonium molybdate and 4g of thiourea in 70ml of deionized water, and stir ultrasonically for 30 minutes; obtain a uniform solution, then transfer the obtained solution to a high-temperature reactor, and react by hydrothermal method at 150°C After 12 hours, cool naturally to room temperature; wash with deionized water and / or absolute ethanol for 3 to 5 times, and finally centrifuge at 1800rpm for 15 minutes, then place the collected molybdenum disulfide in a vacuum oven at 60°C Drying in middle, finally get molybdenum disulfide nano flower powder for standby;

[0052] Step 2: molybdenum disulfide powder 3mg, graphene oxide 3mg (diameter 800nm), fullerenol powder 3mg (particle diameter 15nm) are ultrasonically dispersed in the mixed solution of 2ml deionized water and ethanol to obtain molybdenum disulfide solution (1.5 mg / ml), graphene oxide solution (1....

Embodiment 3

[0057] A preparation method for a fast QCM humidity sensor, comprising the following steps:

[0058] Step 1: Dissolve 3g ammonium molybdate and 6g thiourea in 90ml deionized water, and stir ultrasonically for 50 minutes; obtain a uniform solution, then transfer the obtained solution to a high-temperature reactor, and react by hydrothermal method at 190°C After 10 hours, cool naturally to room temperature; wash with deionized water and / or absolute ethanol for 3 to 5 times, and finally centrifuge at 2000rpm for 15 minutes, then place the collected molybdenum disulfide in a vacuum oven at 60°C Drying in middle, finally get molybdenum disulfide nano flower powder for standby;

[0059] Step 2: molybdenum disulfide powder 5mg, graphene oxide 5mg (diameter 500nm), fullerenol powder 5mg (particle diameter 15nm) ultrasonic dispersion in the mixed solution of 2.5ml deionized water and ethanol obtains molybdenum disulfide solution ( 2mg / ml), graphene oxide solution (2mg / ml) and fullerer...

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Abstract

The invention provides a molybdenum disulfide, graphene oxide and fullererol composite QCM humidity sensor and a preparation method thereof, comprising the following steps: synthesizing molybdenum disulfide nanoflowers by hydrothermal method; ultrasonically dispersing the molybdenum disulfide nanoflower powder Form a molybdenum disulfide solution, and mix it with graphene oxide solution and fullererol solution in a certain proportion to obtain a molybdenum disulfide / graphene oxide / fullererol composite dispersion solution; take an appropriate amount of the composite dispersion solution and apply it to the surface of the QCM substrate Thereby obtain the QCM humidity sensor that is attached with molybdenum disulfide / graphene oxide / fulleranol composite film; The QCM humidity sensor of the present invention not only has very fast response / recovery speed, also has high sensitivity, good repeatability, humidity It has the characteristics of small hysteresis and stable performance, and the sensor can be used for respiratory monitoring.

Description

technical field [0001] The invention belongs to the technical field of humidity sensors, and in particular relates to a fast QCM humidity sensor and its application and a preparation method of the humidity sensor. Background technique [0002] To meet the rapidly growing demand for humidity monitoring in various applications such as industrial, medical, agricultural, and human health, different transducers have been widely used to manufacture humidity sensors, such as interdigital electrodes, field-effect transistors, quartz crystal microbalances ( QCM), among them, the humidity sensor based on QCM has received extensive attention because of its digital frequency output characteristics. [0003] At present, in the article "Enhanced humidity-sensing properties of novel graphene oxide / zinc oxide nanoparticles layered thin film QCM sensor", it is disclosed that the GO solution and ZnO solution are deposited on the QCM transducer by spraying method, and the nanocomposite film ba...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C17/36G01N27/00
CPCC03C17/3644C03C17/3649G01N27/00C03C2218/151C03C2218/154C03C2218/116C03C2218/112
Inventor 陈向东唐坤丁星余兴林
Owner SOUTHWEST JIAOTONG UNIV
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