Film uniformity detection system based on double-path full projection light
A technology of thin film uniformity and detection system, which is applied in the direction of optical instrument testing, optical performance testing, machine/structural component testing, etc. It can solve the problem of thin film image with many isolated noise points, difficult long-term observation, and affecting film uniformity discrimination issues of accuracy
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[0028] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.
[0029] see figure 1 , the embodiment of the present invention includes:
[0030] A film uniformity detection system based on two-way full projection light, including an imaging unit, an acquisition unit, a processing unit, a storage unit, a control unit, a display unit, and an execution unit.
[0031] combine figure 2 , the imaging unit is used to generate P polarized light for uniform illumination, including a light source, a P polarizer, a filter, a collimator, a uniform mirror and a condenser lens arranged in sequence, the centers of which are all located on the same axis, uniform The light mirror is located at the focal point of the conden...
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