Optical measurement system and method for included angle between optical axis of off-axis aspherical mirror and mounting surface

Abstract

The invention provides an optical measurement system and method for an included angle between an optical axis of an off-axis aspheric mirror and a mounting surface. The optical measurement system comprises an interferometer, a parallel optical flat, a compensator and an off-axis aspheric component; the interferometer provides a light source and detects an aspheric surface shape error; light beams emitted by the interferometer sequentially penetrate through the parallel optical flat and the compensator to reach the off-axis aspheric component to be reflected; light rays reflected by the off-axis aspheric component sequentially penetrate through the compensator and the parallel optical flat to enter a detector in the interferometer; the light rays entering the interferometer interfere with reference light in the interferometer, so that interference fringes are formed, and the surface shape error of the aspheric surface is calculated. According to the system and method of the invention, the included angle between the optical axis of the off-axis aspheric mirror and the mounting surface of a supporting structure can be measured and calculated quickly, losslessly and accurately. According to the system and method, existing precise instrument equipment and optical elements are utilized, the optical mirror surface is not damaged, the detection precision is high, the consumed time is short, and a rapid and high-precision nondestructive detection technology can be realized.

Description

technical field [0001] The invention relates to the technical field of detection of off-axis aspheric components, in particular to an optical measurement system and method for the angle between the optical axis of an off-axis aspheric mirror and a mounting surface. In particular, it preferably relates to an optical measurement system and method for the angle between the optical axis of an off-axis aspheric mirror and the mounting surface of a support structure. Background technique [0002] Most of the currently researched off-axis optical systems are developing in the direction of large aperture, large field of view, and high-resolution imaging, which makes the aperture of off-axis aspheric mirrors larger and larger, and the resulting processing problems are also increasingly prominent. . The traditional method is to process a master mirror first and then cut the off-axis aspheric sub-mirror. The advantage of this method is that the shape and position tolerance of the mirr...

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Problems solved by technology

[0005] In view of the prior art mentioned above, the inventor believes that this method is a mechanical contact measurement, which will cause certain damage to the optical mirror surface and has low detection accuracy. In addition, a large amount of data processing is required, which takes a long time

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