Nanoscale object detection method, system, device and storage medium

A detection method and object technology, applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of low detection efficiency and low sensitivity of nanoscale objects, achieve simple and easy structure, sensitive nanoscale object detection, and overcome small vision The effect of field problems

Active Publication Date: 2021-12-28
板石智能科技(武汉)有限公司
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  • Abstract
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Problems solved by technology

[0006] In view of this, the present application provides a nanoscale object detection method, system, device and storage medium to solve the technical problems of low detection efficiency and low sensitivity of nanoscale objects

Method used

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  • Nanoscale object detection method, system, device and storage medium
  • Nanoscale object detection method, system, device and storage medium
  • Nanoscale object detection method, system, device and storage medium

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Embodiment Construction

[0050] Preferred embodiments of the application are described in detail below in conjunction with the accompanying drawings, wherein the drawings constitute a part of the application and together with the embodiments of the application are used to explain the principles of the application and are not intended to limit the scope of the application.

[0051]In the description of the present application, "plurality" means two or more, unless otherwise specifically defined.

[0052] Reference herein to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The occurrences of this phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is understood explicitly and implicitly by those skilled in the art that the e...

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Abstract

The present application relates to a nanoscale object detection method, device and storage medium. The method includes: acquiring multiple intensity images obtained by defocused scanning of the object to be measured along the optical axis, and performing finite numerical difference based on the intensity images to obtain detection The first-order axial differential of the light intensity of the light; the relational expression between the first-order axial differential of the scattering force, the work and the light intensity; the first-order axial differential of the light intensity of the probe light is substituted into the relational expression to obtain The scattering force and work of the object to be measured on the detection light, so as to realize the detection of the object to be measured. The application has the technical effects of high detection efficiency and high sensitivity.

Description

technical field [0001] The present application relates to the technical field of nanoscale microscopic measurement, and in particular to a nanoscale object detection method, system, device and storage medium. Background technique [0002] Under the premise of the continuous development of advanced micro-nano manufacturing, the integration level of various micro-nano devices has also been continuously improved. However, nanoscale disturbances caused by dust particles in the environment or manufacturing processes will degrade device performance and even affect the entire manufacturing supply chain. [0003] Although atomic force microscopes and scanning tunneling microscopes can provide nanoscale or even higher imaging resolution, they need to use probes to perform scanning processes on the surface of the object to be measured, which greatly limits their application range. The scanning electron microscope, which is widely used for micro-nano characterization, has a small fiel...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/84G01B11/24G02B21/00
CPCG01N21/84G01B11/24G02B21/002
Inventor 吴征宇
Owner 板石智能科技(武汉)有限公司
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