Device for preparing double-ceramic-layer coating by automatically evaporating ceramic target material

Abstract

The invention provides a device for preparing a thermal barrier coating by automatically evaporating a ceramic target material and a preparation method. The device comprises a first material ejecting assembly (1), a second material ejecting assembly (2), a rotating assembly (3) and a crucible assembly (4). In the process of preparing the coating through electron beam physical vapor deposition, the rotating assembly (3) can drive the target material in the crucible assembly (4) to rotate at a certain speed, so that the surface of the target material is uniformly evaporated; the first material ejecting assembly (1) can drive the target material in a first crucible (26) to move up and down, and the second material ejecting assembly (2) can drive a target material in a second crucible (27) to move up and down, so that automatic replacement of the target material in the electron beam physical vapor deposition process is achieved, the working efficiency of preparing the thermal barrier coating through the electron beam physical vapor deposition coating is improved, the structural stability of the double-ceramic-layer coating is improved, and the process stability of the preparation process is improved.

Description

technical field [0001] The invention relates to the technical field of preparation of thermal barrier coatings, in particular to a device for realizing the automatic evaporation of ceramic targets by electron beam physical vapor deposition to prepare thermal barrier coatings. Background technique [0002] As the protective layer of engine hot end parts, thermal barrier coating is generally composed of ceramic layer and metal bonding layer. At present, the most widely used ceramic layer is 8YSZ layer, but it will undergo coating phase change and sintering when it is in service above 1473K , and is easily corroded by high temperature, which cannot meet the growing needs of aerospace technology. Therefore, the researchers combined other new materials with advantages such as high melting point, low thermal conductivity, and high temperature stability with 8YSZ to form a double-layer thermal barrier coating. [0003] Electron beam physical vapor deposition (EB-PVD) technology is...

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Problems solved by technology

[0004] At present, the ceramic target evaporation device used in EB-PVD is a single crucible device. In order to ensure the uniformity of coating thickness, the amount of furnace loading for a single batch of samples to be deposited is small.

And at present, in the process of EB-PVD preparation of double-layer ceramic layer, after the deposition of the first layer of ceramic layer is completed, the target material is manually replaced and then the second layer of target material is prepared. The process of target material replacement affects the surface temperature of the coating, which is not conducive to Coating Stable Deposition

In the patent with the publication number CN111607762A, a method for realizing the automatic evaporation of a single target is given, but this device can only realize the automatic and stable preparation of a single-layer ceramic layer, and it is still necessary to replace the target when preparing a double-ceramic layer, which affects Preparation process stability

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