A high temperature and high vacuum annealing furnace
A high vacuum and annealing furnace technology, applied in vacuum evaporation coating, furnace, furnace type and other directions, can solve the problems of low vacuum degree of vacuum annealing furnace, low temperature of vacuum annealing furnace, clean process environment, etc., to improve the use of heat efficiency, preventing heat loss, and good heating uniformity
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0028] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0029] like Figures 1 to 4 As shown, the present invention includes a sampling chamber assembly 1, an annealing chamber assembly 2 and a vacuuming assembly, wherein the vacuuming assembly includes an ion pump 3, a molecular pump 7 and a mechanical pump 8, and the sampling chamber assembly 1 includes a sampling chamber cavity 25 , sample library 27 and manual transfer rod manipulator 29, annealing chamber assembly 2 includes annealing chamber chamber 15, upper heater 16 and lower heater 21, ion pump 3, annealing chamber chamber 15, sample injection chamber chamber 25 and molecules The pumps 7 are connected in sequence, the molecular pump 7 and the mechanical pump 8 are connected through pipelines, between the ion pump 3 and the annealing chamber cavity 15, between the annealing chamber cavity 15 and the sampling chamber cavity 25, and between the sampling cha...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com