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Two-dimensional temperature balance mode mems wind speed and direction sensor and preparation method thereof

A technology of temperature balance, wind speed and direction, applied in thermometers, speed/acceleration/shock measurement, thermometers with electric/magnetic elements that are directly sensitive to heat, etc., can solve the problems of complex process of wind speed and direction sensors, and achieve reduction in number, The effect of simplifying the preparation process

Active Publication Date: 2022-05-27
SOUTHEAST UNIV
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Problems solved by technology

[0005] Purpose of the invention: Aiming at the above existing technologies, a two-dimensional temperature balance mode MEMS wind speed and direction sensor and its preparation method are proposed to solve the complex process problem of the wind speed and direction sensor based on the temperature balance mode of the thermocouple structure

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  • Two-dimensional temperature balance mode mems wind speed and direction sensor and preparation method thereof
  • Two-dimensional temperature balance mode mems wind speed and direction sensor and preparation method thereof
  • Two-dimensional temperature balance mode mems wind speed and direction sensor and preparation method thereof

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Embodiment Construction

[0025] The present invention is further explained below in conjunction with the accompanying drawings.

[0026] A two-dimensional temperature balance mode MEMS wind speed and wind direction sensor, including sensor chip part and measurement and control circuit. The sensor chip portion comprises a substrate 1, a heating element 2, a temperature measuring element and a metal contact electrode 6. Four heating elements 2 are symmetrically distributed around the center of the chip on substrate 1 to form a symmetrical temperature distribution field on the surface of the chip. The temperature measuring element is composed of a first thermopile distributed in the direction of N-S and a second thermopile distributed in the direction of W-E, the first thermopile and the second thermopile are composed of the lower layer of material A thermocouple arm 3 and the upper layer of material B thermocouple arm 5, and the two layers of material are insulated with an insulating layer 4. Wherein, the l...

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Abstract

The invention discloses a two-dimensional temperature balance mode MEMS wind speed and wind direction sensor and a preparation method thereof. The sensor includes a sensor chip part and a measurement and control circuit, the sensor chip part is based on a thermocouple structure, and the measurement and control circuit system adopts a temperature balance mode. The temperature measuring element thermocouple in the chip consists of two layers of thermocouple arms. Based on the idea of ​​time-division multiplexing, the output voltage in the x and y directions is continuously sampled, and the power consumption on the four heating elements is adjusted by the control circuit, so that the temperature difference between the upstream and downstream in the x and y directions is zero. Finally, wind speed and wind direction information can be obtained according to the power consumption values ​​of the four heating elements. Compared with the existing technology, this sensor structure proposes a new thermocouple-based two-dimensional wind speed and direction sensing structure and detection process. In addition, it solves the problem of cross-connection of thermocouple arms in the vertical direction, and realizes multi-layer thermopile measurement. It has the advantages of reducing the number of material layers and optimizing the preparation process at high temperature.

Description

Technical field [0001] The present invention discloses a two-dimensional temperature balance mode MEMS wind speed and direction sensor based on the thermocouple structure, which belongs to the technical field of measurement testing. Background [0002] Effective and timely acquisition of wind speed and wind direction information is very important in the fields of daily life and production such as transportation and transportation, meteorological monitoring, wind power generation, and agricultural production. Based on different measurement principles, wind speed and wind direction sensors can be roughly divided into mechanical, ultrasonic and thermal types. Among them, mechanical due to mechanical wear leads to high maintenance costs, ultrasonic due to the limitations of the measurement principle is difficult to achieve miniaturization, and thermal sensors use fluid flowing through the surface of the device thermal convection, causing changes in the surface temperature distributio...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P5/10G01P13/02G01K7/02
CPCG01P5/10G01P13/02G01K7/02G01K7/028
Inventor 易真翔谢雨珏秦明黄庆安
Owner SOUTHEAST UNIV
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