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Gyroscope

A gyroscope and resonator technology, applied in the field of gyroscopes, can solve problems such as insufficient drive/detection sensitivity, and achieve the effect of improving drive/detection sensitivity

Pending Publication Date: 2021-09-21
瑞声开泰科技(武汉)有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The gyroscope in the related art is still insufficient in drive / detection sensitivity due to structural and space constraints

Method used

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  • Gyroscope
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Please refer to Figure 1 to Figure 3 , the gyroscope 100 includes a base 1 , a resonator 2 suspended on the base 1 , and an anchor point 3 and an electrode assembly 4 fixed on the base 1 .

[0040] The resonator 2 includes a resonant beam 21 and an outer resonator 22, an inner resonator 23, and a middle resonator 24 all in the shape of a ring, and the middle resonator 24 is sleeved on the outside of the inner resonator 23, so that The outer resonator 22 is sleeved on the outer side of the middle resonator 24 .

[0041] The middle resonator 24 includes 8N resonant units 241 uniformly distributed along the circumferential direction of the inner resonator 23, and the resonant beam 21 is divided into a first resonant unit connecting the resonant unit 241 and the outer resonator 22. The beam 21A and the second resonant beam 21B connecting the inner resonator 23 and the resonant unit 241 . Wherein, N is a positive integer, and the resonant beam 21 can be elastically deform...

Embodiment 2

[0053] Please refer to Figure 4 to Figure 6 The difference between the second embodiment and the first embodiment is only that: when the moving direction of the middle resonator 24 is designed to be consistent with that of the outer resonator 22 and the inner resonator 23, the electrode assembly 4' includes the second An electrode 41' and a second electrode 43', the first electrode 41' and the second electrode 43' are respectively arranged on opposite sides of the anchor point 3 along the radial direction of the inner resonator 23, wherein , the resonant unit 241 is formed with a first comb-tooth portion 24C, the first electrode 41 ′ and the second electrode 43 ′ are both formed with a second comb-tooth portion 24D, and the first comb-tooth portion 24C The comb teeth of the comb teeth and the comb teeth of the second comb tooth part 24D are interleaved and interleaved and spaced from each other to form a capacitor. Therefore, variable area combs can be used to realize the el...

Embodiment 3

[0055] see Figure 7 with Figure 8 , the difference between the third embodiment and the first embodiment is only:

[0056] A decoupling structure 6 arranged around the anchor point 3 is provided between the anchor point 3 and the resonance unit 241 .

[0057] The decoupling structure 6 includes a first part 61 and a second part 63, the first part 61 is provided on two opposite sides of the anchor point 3 along the circumferential direction of the resonance unit 241, and the anchor point 3 is arranged along the Two opposite sides in the radial direction of the resonant unit 241 are provided with the second part 63, the first coupling beam 5A is connected between the first part 61 and the anchor point 3, and the second part 63 and the resonance unit 241 is connected with a second coupling beam 5B, wherein the first coupling beam 5A can only be elastically deformed in the radial direction of the inner resonator 23, and the second The coupling beam 5B is elastically deformabl...

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PUM

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Abstract

The invention discloses a gyroscope. The gyroscope comprises: a substrate; a resonator which is suspended on the substrate, wherein the resonator comprises a resonant beam, an outer resonator, an inner resonator and a middle resonator, the outer resonator, the inner resonator and the middle resonator are all in a circular ring shape, the middle resonator sleeves the outer side of the inner resonator, the outer resonator sleeves the outer side of the middle resonator, the middle resonator comprises 8N resonant units which are uniformly distributed in the circumferential direction of the inner resonator, the resonant beams are divided into first resonant beams connected with the resonant units and the outer resonators and second resonant beams connected with the inner resonators and the resonant units, and N is a positive integer; an anchor point which is fixed on the substrate and is in mechanical field coupling with the resonance unit; and an electrode assembly which is fixed on the substrate and is coupled with an electric field of the resonator to drive the resonator to vibrate in a first direction and a second direction which are perpendicular to each other, and detects the vibration displacement of the resonator along a direction forming an included angle of 45 degrees with the first direction or a direction forming an included angle of 135 degrees with the first direction.

Description

【Technical field】 [0001] The invention relates to the technical field of gyroscopes, in particular to a gyroscope. 【Background technique】 [0002] Micro-mechanical gyroscopes, namely MEMS (Micro Electro Mechanical systems) gyroscopes, are a typical angular velocity microsensor. Due to their small size, low power consumption and convenient processing, they are widely used in the consumer electronics market. In recent years, with the gradual improvement of gyroscope performance, it has been widely used in automotive, industrial, virtual reality and other fields. [0003] The gyroscope in the related art still has insufficient driving / detecting sensitivity due to structural and space constraints. [0004] Therefore, it is necessary to provide a new gyroscope to solve the above problems. 【Content of invention】 [0005] The object of the present invention is to disclose a gyroscope which can improve driving / detection sensitivity. [0006] The purpose of the present invention...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56
CPCG01C19/56
Inventor 李杨杨珊占瞻马昭阚枭黎家健洪燕陈秋玉
Owner 瑞声开泰科技(武汉)有限公司
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