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High-end equipment manufacturing process quality online monitoring method and system

A technology of manufacturing process and equipment, applied in the field of online monitoring of high-end equipment manufacturing process quality, can solve the problem of inability to accurately monitor the quality of high-end equipment manufacturing process online, and achieve the effect of accurate online monitoring results, improved processing capacity, and improved classification accuracy

Active Publication Date: 2021-07-13
HEFEI UNIV OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0006] Aiming at the deficiencies of the existing technology, the present invention provides a method and system for online monitoring of the quality of the high-end equipment manufacturing process, which solves the problem that the existing technology cannot accurately monitor the quality of the high-end equipment manufacturing process online based on a large amount of quality data

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  • High-end equipment manufacturing process quality online monitoring method and system
  • High-end equipment manufacturing process quality online monitoring method and system
  • High-end equipment manufacturing process quality online monitoring method and system

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Embodiment 1

[0065] In the first aspect, the embodiment of the present invention first proposes an online monitoring method for the quality of high-end equipment manufacturing process, see figure 1 , the method includes:

[0066] S1. Obtain the quality data generated in the high-end equipment manufacturing process, and divide the above quality data into training data and data to be tested;

[0067] S2. Using the geodesic distance instead of the Euclidean distance to improve the kernel function of the support vector machine, and based on the above training data, the support vector machine is trained. Co-optimize the parameters of quality features and support vector machines;

[0068] S3. Based on the above-mentioned data to be detected, use the above-mentioned optimized support vector machine to perform online monitoring of the quality of the high-end equipment manufacturing process.

[0069] It can be seen that in the online monitoring method and system of high-end equipment manufacturin...

Embodiment 2

[0119] In the second aspect, the present invention also provides an online monitoring system for high-end equipment manufacturing process quality, the system includes:

[0120] A data acquisition module, configured to acquire quality data generated during the high-end equipment manufacturing process, and divide the quality data into training data and data to be tested;

[0121] The model training and optimization module is used to improve the kernel function of the support vector machine by using the geodesic distance instead of the Euclidean distance, and train the support vector machine based on the training data, and adopt the variable neighborhood search of introducing a competition mechanism at the same time The algorithm performs collaborative optimization on the quality features of the quality data and the parameters of the support vector machine;

[0122] The quality detection module is used to conduct online quality monitoring of the high-end equipment manufacturing p...

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Abstract

The invention provides a high-end equipment manufacturing process quality online monitoring method and system, and relates to the technical field of quality online monitoring. Firstly, a geodesic distance is used to replace an Euclidean distance to improve a kernel function of a support vector machine, and then a variable neighborhood search algorithm introducing a competition mechanism is used to carry out collaborative optimization on a quality data feature subset and parameters of the support vector machine. And finally, the trained and optimized support vector machine is utilized to carry out on-line monitoring on the high-end equipment manufacturing process quality. According to the technical scheme, the processing capacity of the support vector machine for nonlinear data is improved, a combined optimization scheme of the feature subsets and the support vector machine parameters is obtained, and the classification precision of the support vector machine model is improved to a certain extent; therefore, the online monitoring result of the quality of the high-end equipment manufacturing process based on a large amount of quality data is more accurate.

Description

technical field [0001] The invention relates to the technical field of online quality monitoring, in particular to a method and system for online quality monitoring of high-end equipment manufacturing process. Background technique [0002] The manufacturing process of high-end equipment is an important part of its quality formation, and the quality monitoring of this process is of great significance. With the continuous updating of technology, the increasingly complex manufacturing process, and the surge of quality characteristic data in the high-end equipment manufacturing process, it is becoming more and more difficult to accurately monitor the quality of the high-end equipment manufacturing process online. In recent years, there are mainly model-based methods and data-based methods for quality monitoring of high-end equipment manufacturing processes. Due to the complexity of high-end equipment, its internal mathematical model is difficult to accurately describe, making s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06Q10/06G06Q10/04G06Q50/04G06K9/62G06N3/00
CPCG06Q10/06395G06Q10/04G06Q50/04G06N3/006G06F18/2411Y02P90/30
Inventor 刘心报胡俊迎钱晓飞裴军周谧周志平
Owner HEFEI UNIV OF TECH
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