A kind of quantum cascade laser chip and preparation method thereof

Abstract

Embodiments of the present disclosure provide a quantum cascade laser chip and a preparation method. The quantum cascade laser chip includes: a substrate; a double groove ridge structure, the double groove ridge structure is arranged on the substrate; a first electrode, the first electrode is arranged on the target surface of the double groove ridge structure; two semi-insulating filling layers , two semi-insulating filling layers are respectively arranged in the grooves opened on two sides of the double-groove ridge structure to form a semi-insulating buried structure for the semi-insulating filling layer; two auxiliary ridge structures, each auxiliary ridge structure is arranged on the lining On the bottom, two auxiliary ridge structures are respectively arranged on opposite sides of the double-groove ridge structure; and two second electrodes, which are respectively arranged on the two auxiliary ridge structures, and the target surface of the first electrode is in contact with the second electrode. The height difference between the target surfaces of the two electrodes is less than or equal to the first distance threshold. The quantum cascade laser chip can improve the heat dissipation while increasing the response rate.

Description

technical field [0001] The invention relates to the technical field of infrared optoelectronic devices, in particular to a quantum cascade laser chip and a preparation method thereof. Background technique [0002] Quantum Cascade Laser (QCL) is a semiconductor laser capable of emitting laser light in the mid-infrared and far-infrared wavelengths. For the infrared quantum cascade laser whose emission wavelength is located in the atmospheric window of 3-5 μm or 8-14 μm, it has the advantages of small size, low power consumption, tunable wavelength, large design flexibility and high response rate. Moreover, due to its long emission wavelength and weak scattering by atmospheric particles, it has unique advantages in space communication and gas detection. [0003] In the process of realizing the concept of the present disclosure, the inventors found that the related art has at least the following problems, that there is a contradiction between the response rate of the quantum ca...

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Problems solved by technology

[0003] In the process of realizing the concept of the present disclosure, the inventors found that there are at least the following problems in the related technology, there is a contradiction between the response rate of the quantum cascade laser and the heat dissipation

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