Metal mask plate and use method thereof

A metal mask and mask technology, which is applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problems of inability to ensure the normal connection between the metal layer and the power wiring and high preparation costs, and avoid the problems of The effect of alignment/separation equipment, reduction of manufacturing costs, and savings in the length of the vapor deposition chamber and equipment costs

Active Publication Date: 2021-06-04
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The invention provides a metal mask and its use method, which can solve the problem that OLED device preparation in the prior art requires multiple masks, and the preparation cost is relatively high. If a metal mask is used, the metal layer and power supply cannot be guaranteed. The problem of the normal connection of the wiring

Method used

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  • Metal mask plate and use method thereof
  • Metal mask plate and use method thereof
  • Metal mask plate and use method thereof

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Embodiment Construction

[0032] The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [top], [bottom], [front], [back], [left], [right], [inside], [outside], [side], etc., are only for reference The orientation of the attached schema. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention. In the figure, units with similar structures are indicated by the same reference numerals, and the dotted lines in the figure indicate that they do not exist in the structure, and only illustrate the shape and position of the structure.

[0033] The present invention aims at the OLED device preparation in the prior art requires multiple masks, and the preparation cost is relatively high. If a metal mask is used to ensure the normal connection between the metal...

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Abstract

The embodiment of the invention provides a metal mask plate and a use method thereof. The metal mask plate comprises a metal frame and a mask screen plate fixed on the metal frame, the mask screen plate is provided with a groove, a photoinduced deformation layer is arranged in the groove, under the illumination of a light source, the photoinduced deformation layer deforms and protrudes out of the groove, by changing the distance between the to-be-evaporated substrate and the metal mask plate, the area of a film forming region for evaporating an organic material and a metal material is indirectly changed, two film layers are sequentially evaporated by one metal mask plate, more alignment / separation equipment is avoided, the length of an evaporation cavity and the equipment cost are greatly saved, and the preparation cost of an OLED device is reduced.

Description

technical field [0001] The invention relates to the technical field of display device manufacturing, in particular to a metal mask and a method for using the same. Background technique [0002] Organic electroluminescence technology is a new type of display technology. Its implementation method is: the OLED device layer is prepared by vacuum evaporation technology, and the organic / metal material is heated in the vacuum environment within the range of 10Pa to 5Pa. The metal mask forms an organic / metal thin film with a certain shape on the surface of the substrate, and the OLED device with multi-layer thin films is formed through continuous deposition of various materials. [0003] In the evaporation process, due to the need to evaporate organic layer light-emitting layer, inorganic layer, cathode, reflective layer, buffer layer and other functional layers in OLED devices, generally speaking, considering the problem of metal cathode overlap, organic layer and inorganic layer ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 段廷原
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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