Serial double-coil radio frequency driving gas discharge device

Abstract

According to a serial double-coil radio frequency driving gas discharge device, a serial double-coil structural design is adopted, plasma discharge can be generated through driving excitation of radio-frequency signals with the same frequency or different frequencies, the length of a discharge area is longer than that of a single-coil resonant cavity, gas discharge can be generated in a larger range, metastable state atom excitation efficiency can be improved, and the metastable state atom beam intensity can be increased; a compression ring and a positioning cover ring are used for positioning a gas conduit so that the coaxiality and the collimation of the gas conduit and a mounting flange can be effectively ensured, and atomic beam orientation is facilitated; and an electrified solenoid coil is wound outside a shielding layer by an enameled wire, a current is introduced to generate a magnetic field, electrons in the plasma do rotary motion along magnetic lines of force, a collision probability of the electrons and atoms can be further improved, and the excitation efficiency is increased. According to the invention, different kinds of gases or other samples can be filled according to requirements, and the device is used for low-voltage plasma discharge of various gases so that multiple purposes are realized.

Description

technical field [0001] The invention relates to a tandem double-coil radio-frequency-driven gas discharge device, which is used to generate low-temperature and low-pressure gas plasma discharge, and generates a metastable atomic beam through electron collision excitation, which can be used for precision spectrum measurement, atomic lithography, atomic Frequency standard and other research and application fields. Background technique [0002] The metastable atomic beam with high intensity and high collimation has important applications in many fields such as atomic lithography, atomic optics, atomic collision, atomic frequency standard, precision spectrum measurement, trace analysis, Bose-Einstein condensate, etc. . Many physical processes and applications can only be achieved with high-intensity beams of atoms. Therefore, how to generate a high-intensity metastable atomic beam has become a very important technical problem. [0003] Usually, direct current or radio frequen...

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Problems solved by technology

[0004] The above-mentioned structure has the following problems: the existing helical resonator radio frequency gas discharge device has a short discharge area, less probability and number of collisions between atoms and electrons, lower excitation efficiency, and cannot generate high-intensity metastable atomic beams; The optimal air pressure range is small, the discharge state is sensitive to the air pressure, and the intensity and collimation of the beam cannot be taken into account, and the metastable beam generated cannot meet the requirements of the used index; at the same time, after the discharge coil is repeatedly switched on and off in vacuum, The heating effect of the high-power RF signal causes the coil to anneal, and the resonance performance of the coil decreases, which affects the reliable operation of the system

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