Method and system for automatically correcting wafer flatness in double-sided polishing process

A double-sided polishing and flatness technology, applied in grinding/polishing equipment, machine tools suitable for grinding workpiece planes, grinding devices, etc., to achieve automatic adjustment, improve product yield, and achieve control effects

Pending Publication Date: 2021-05-28
ZING SEMICON CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the existing DSP process mainly relies on manual real-time adjustment

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  • Method and system for automatically correcting wafer flatness in double-sided polishing process
  • Method and system for automatically correcting wafer flatness in double-sided polishing process
  • Method and system for automatically correcting wafer flatness in double-sided polishing process

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Embodiment Construction

[0033] In the following description, numerous specific details are given in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without one or more of these details. In other examples, some technical features known in the art are not described in order to avoid confusion with the present invention.

[0034] It should be understood that the invention can be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. Like reference numerals refer to like elements throughout.

[0035] It will be understood that when an element or layer is referred t...

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Abstract

The invention discloses a method and system for automatically correcting wafer flatness in the double-face polishing process. The method comprises the steps that the temperature of the outer side of an upper polishing disc and the temperature of the inner side of the upper polishing disc are obtained; the temperature of the outer side of the upper polishing disc is compared with the temperature of the inner side of the upper polishing disc; and the height difference between the inner side of the upper polishing disc and the outer side of the upper polishing disc is adjusted based on the temperature difference between the outer side of the upper polishing disc and the inner side of the upper polishing disc. According to the method for automatically correcting the wafer flatness in the double-face polishing process, the height difference between the inner side of the upper polishing disc and the outer side of the upper polishing disc is automatically adjusted based on the temperature difference between the outer side of the upper polishing disc and the inner side of the upper polishing disc, and automatic adjustment of the wafer flatness in the double-face polishing process is achieved; and the wafer flatness control is realized, and the product yield is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method and system for automatically correcting wafer flatness during double-side polishing. Background technique [0002] With the continuous development of integrated circuit (Integrated circuit, IC) manufacturing technology, the feature size of the chip is getting smaller and smaller, the number of interconnection layers is increasing, and the diameter of the wafer is also increasing. To achieve multi-layer wiring, the wafer surface must have extremely high flatness, smoothness and cleanliness, and chemical mechanical polishing is currently the most effective wafer planarization technology. [0003] The surface polishing of silicon wafers mostly adopts double side polishing (Double Side Polish, DSP), usually using alkaline silica polishing fluid, and the chemical reaction is Si+H 2 O+2OH - → SiO 3 2- +2H 2 , it uses the chemical corrosion reaction of alkali and si...

Claims

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Application Information

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IPC IPC(8): B24B37/08B24B7/22B24B37/015B24B37/005
CPCB24B37/08B24B7/228B24B37/015B24B37/005
Inventor 权林胡文才张宇磊周嬅季文明
Owner ZING SEMICON CORP
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