Crystal growth furnace window lens cleaning device

Abstract

The invention discloses a crystal growth furnace window lens cleaning device. The crystal growth furnace window lens cleaning device comprises a support base, a lens bearing device and lens cleaning units, wherein the lens bearing device is connected with a first feeding unit, so that the lens bearing device feeds according to a set operation route; each lens cleaning unit is connected with one second feeding unit, so that the lens cleaning unit can be close to or far away from the lens bearing device; at least a part of the lens cleaning units carry out polishing cleaning, and at least a part of the lens cleaning units carry out cleaning liquid cleaning; and the lens cleaning device further comprises an electric control system, and the first feeding unit, the second feeding units and the multiple lens cleaning units are all controlled by the electric control system. The crystal growth furnace window lens cleaning device can clean the window lens in batches with high efficiency and high quality, meanwhile, the cleaning cost can be reduced, the labor force is liberated, and the cleaning device has the advantages of being managed safely and the like.

Description

technical field [0001] The application belongs to the technical field of mirror surface cleaning, and in particular relates to a cleaning device for window lenses of crystal growth furnaces. Background technique [0002] As we all know, silicon carbide is one of the important third-generation semiconductor materials. It is widely used in power electronics, radio frequency devices, Optoelectronic devices and other fields. [0003] In the production process of silicon carbide, in order to obtain a certain quality product, the environment in the crystal growth furnace must be accurately monitored, especially in the seeding process, the environment in the crystal growth furnace plays an important role in the direction of the crystal lattice. Therefore, it is necessary to effectively monitor the crystal growth furnace. In the prior art, in order to monitor the interior of the crystal growth furnace, it is necessary to open a window on the crystal growth furnace, and during the ...

AI Technical Summary

Problems solved by technology

There are many problems in this approach, for example, because the cleaning time of each window lens is long, and it is easy to cause waste of cleaning liquid in the cleaning process, which greatly increases the cleaning cost; Cleaning liquid to clean it, the cleaning liquid often contains substances harmful to the human body, which can easily cause harm to workers; another example, in the cleaning process, a high concentration of industrial alcohol is required, and the use of industrial alcohol requires the working environment Extremely high, if it cannot be effectively controlled, it will easily cause safety accidents

It is worth noting that the crystal growth furnaces in enterprises often work in batches. If the window lenses cannot be cleaned quickly and effectively in batches, it may even affect the normal production of the factory.

In addition, the cleaning of the window lenses requires a lot of manpower, which increases the labor cost of the enterprise

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