Evaporation source feeding device and evaporation source feeding method

Abstract

The invention relates to the technical field of evaporation, and discloses an evaporation source feeding device and an evaporation source feeding method. The evaporation source feeding device comprises an evaporation assembly, a driving assembly, a pre-evaporation probe, an evaporation probe and a control module, wherein the evaporation assembly comprises a working station used for evaporation and a waiting station used for pre-evaporation; heating assemblies are arranged on the working station and the waiting station; crucibles are arranged in the heating assemblies; the heating assembly located at the waiting station can pre-evaporate materials in the crucible on the heating assembly to a preset evaporation rate; the driving assembly is used for driving the heating assemblies on the working station and the waiting station to change positions; the pre-evaporation probe is used for detecting the evaporation rate of the materials on the waiting station; the evaporation probe is used for detecting the evaporation rate of the materials on the working station; and the control module is used for controlling the evaporation assembly, the driving assembly, the pre-evaporation probe or the evaporation probe to execute a preset action according to a preset instruction or an operation instruction. According to the evaporation source feeding device and the evaporation source feeding method provided by the invention, continuous evaporation can be achieved through the evaporation assembly, and the evaporation efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of evaporation, in particular to an evaporation source feeding device and an evaporation source feeding method. Background technique [0002] Organic thin-film electroluminescence display device (OLED) is a new technology in which organic semiconductor materials emit light under the action of an electric field, and has developed rapidly in recent years. The advantages of OLED lighting products such as low energy consumption, environmental protection, ultra-thin, high color saturation, and surface light source make it one of the mainstream trends in the development of lighting products in the future. Nowadays, OLED lighting devices are mainly prepared by evaporation coating. In actual production, because they are produced under high vacuum conditions and have multiple evaporation processes, the current production line scheme mainly adopts a cluster structure. , that is, a plurality of octagonal chambers are ...

AI Technical Summary

Problems solved by technology

However, because the entire production line is long, the evaporation time is required to be longer, and more materials in the organic and metal beam sources are required. It will cause the uniformity of the material evaporated onto the substrate to deteriorate; in addition, during the evaporation process, it usually takes more time to preheat the crucible, which reduces the evaporation efficiency

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