Continuous evaporation system

Abstract

The invention discloses a continuous evaporation system which comprises an evaporation crucible, a storage crucible, a conveying pipe, a valve and a temperature control device. Evaporation materials are stored in the evaporation crucible, the top of the evaporation crucible is provided with an evaporation outlet, evaporation materials are stored in the storage crucible, one end of the conveying pipe is connected with the storage crucible, the other end of the conveying pipe I connected with the evaporation crucible, the valve is arranged on a pipeline of the conveying pipe, and the temperature control device is connected with the evaporation crucible, the storage crucible and the conveying pipe and used for controlling the temperature of the evaporation crucible, the storage crucible an the conveying pipe. According to the continuous evaporation system, the traditionally cooling, adding and heating procedure are avoided, the possibility that a base plate is polluted is reduced, the production efficiency is improved, and the production cost is reduced.

Description

technical field [0001] The invention relates to the technical field of vapor deposition, in particular to a continuous vapor deposition system. Background technique [0002] OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode, referred to as OLED) display is thin, light, wide viewing angle, active luminescence, continuously adjustable luminous color, fast response, low energy consumption, low driving voltage, and operating temperature range Wide, simple production process, high luminous efficiency and flexible display, etc., have been listed as a promising next-generation display technology. [0003] The preparation of OLED devices usually requires the use of small molecule evaporation. Small molecule evaporation is mainly to heat organic materials in a high vacuum environment to vaporize sublimated or molten organic materials at high temperatures. The sublimated or vaporized atoms of the evaporated materials , Molecules or atomic groups are deposited on the su...

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Problems solved by technology

[0004] However, due to the limited capacity of the evaporation crucible, it is often necessary to open the cavity to add evaporation materials, and it takes a long time from cooling down to adding evaporation materials to the establishment of a high vacuum environment, which greatly limits the production capacity of the evaporation machine and increases OLED. The production cost of the display, in addition, adding evaporation materials to the evaporation chamber can easily lead to dust entry, resulting in contamination of the substrate

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