A wafer position detection device
A detection device and wafer technology, which is applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve problems such as the limitation of the applicable range of sensors, affecting the yield rate, and sensor defects, so as to reduce the area of scratches and improve the quality of finished products. rate and improve reliability
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[0039] The embodiment of the present invention discloses a wafer position detection device, so as to solve the problem that the wafer surface is defective due to the direct contact of the sensor and affects the yield.
[0040] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0041] see Figure 1-Figure 7 , figure 1 A schematic diagram of the appearance structure of the wafer position detection device provided by the embodiment of the present invention; figure 2 for figure 1 Schematic d...
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