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266nm solid-state laser and light beam quality optimization method thereof

A 266nm, solid-state laser technology, applied in the laser field, can solve problems such as poor beam quality of outgoing light, short deliquescence lifetime, and high cost of CLBO crystals

Active Publication Date: 2021-03-16
RAINBOW SOURCE LASER RSLASER
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Problems solved by technology

[0004] In order to solve the problem of obtaining 266nm high-power ultraviolet laser in the prior art, because the existing BBO crystal has a large dispersion angle, the quality of the outgoing light beam is poor, and the CLBO crystal is high in cost and easy to deliquescence and has a short life, the solid-state laser cannot be effectively balanced. The technical problems of cost, laser beam quality and service life, the invention provides a kind of 266nm solid-state laser and its beam quality optimization method

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  • 266nm solid-state laser and light beam quality optimization method thereof
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  • 266nm solid-state laser and light beam quality optimization method thereof

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[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0025] It should be noted that, in the accompanying drawings or in the text of the specification, implementations that are not shown or described are forms known to those of ordinary skill in the art, and are not described in detail. In addition, the above definitions of each element and method are not limited to the various specific structures, shapes or methods mentioned in the embodiments, and those skilled in the art can easily modify or replace them.

[0026] It should also be noted that the directional terms mentioned in the embodiments, such as "up", "down", "front", "back", "left", "right", etc., are only referring to the directions of the drawings, not Used to limit the protection scope of this disclosure. Throu...

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Abstract

The invention provides a 266nm solid-state laser and a light beam quality optimization method thereof. The 266nm solid-state laser comprises a first frequency multiplication structure and a second frequency multiplication structure, the second frequency multiplication structure is arranged behind the first frequency multiplication structure along a laser emergent light path of the 266nm solid laser and is used for receiving a 532nm laser beam formed by the first frequency multiplication structure and converting the 532nm laser beam into a 266nm high-power ultraviolet laser beam; the second frequency multiplication structure comprises a quadruplicated frequency crystal assembly, the quadruplicated frequency crystal assembly is formed by combining a first BBO crystal, a CLBO crystal and a second BBO crystal which are sequentially arranged along a laser emergent light path, and the quadruplicated frequency crystal assembly is used for carrying out frequency multiplication conversion on a532nm laser beam emitted along the laser emergent light path so as to obtain a 266nm high-power ultraviolet laser beam. Therefore, on the basis of the 266nm solid laser provided by the invention, under the condition of ensuring 266nm laser power output, two nonlinear crystal cascade modes of the BBO crystal and the CLBO crystal are used, so that the output light beam quality is improved, the service life of the crystals is prolonged, and the laser cost is reduced.

Description

technical field [0001] The invention relates to the field of laser technology, in particular to a nonlinear crystal-based 266nm solid-state laser and a beam quality optimization method thereof. Background technique [0002] At present, as an important method to obtain high-power ultraviolet laser, frequency doubling conversion technology has received more and more attention. Among them, the laser power and beam quality output based on the nonlinear effect of the crystal are closely related to the material, structure and corresponding characteristics of the crystal itself. Usually, in frequency doubling conversion technology, in order to achieve the purpose of converting 532nm to 266nm laser, the nonlinear crystals usually used are mainly BBO and CLBO crystals. Both BBO crystal and CLBO crystal have higher transmittance for 532nm and 266nm. Among them, compared with CLBO crystals, BBO crystals also have low cost, large effective nonlinear coefficient, low deliquescence char...

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Application Information

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IPC IPC(8): H01S3/109H01S3/02H01S3/07H01S3/102
CPCH01S3/027H01S3/07H01S3/1028H01S3/109
Inventor 陈彬彬王家赞江锐任俊杰刘广义
Owner RAINBOW SOURCE LASER RSLASER
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