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Multifunctional vertical zero overlapping scanning interferometry device

A technology of scanning interference and measuring devices, which is applied to measuring devices, using optical devices, instruments, etc., can solve the problems that the deflection mirror increases the difficulty of measurement alignment, is not conducive to ensuring the accuracy and stability of large mirror surfaces, and the optical path is not flexible enough. , to achieve the effect of improving the range and detection accuracy, saving time and economic costs, and flexible layout

Active Publication Date: 2021-03-16
NAT UNIV OF DEFENSE TECH
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  • Abstract
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Problems solved by technology

The main disadvantage of this device is that the deflection mirror increases the difficulty of measurement alignment and introduces measurement errors; the optical path is not flexible enough, and limited by the structure, it is only suitable for a small range of aspheric mirrors; in addition, the measured aspheric mirror participates in multiple Motion adjustment, which is not conducive to ensuring the accuracy and stability of large mirror measurements

Method used

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  • Multifunctional vertical zero overlapping scanning interferometry device
  • Multifunctional vertical zero overlapping scanning interferometry device
  • Multifunctional vertical zero overlapping scanning interferometry device

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Embodiment Construction

[0032] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0033] Such as figure 1 As shown, the multifunctional vertical zero-position overlapping scanning interferometry device of this embodiment includes a main control unit 6, a drive control circuit 7, and an air-floating vibration-isolation base 8. The air-floating vibration-isolation base 8 is respectively provided with a column 9 and a DUT (see figure 1 In the four-dimensional motion adjustment platform 5 of label 4), the vertical lifting shaft 91 is provided on the column 9 and the laser wave front interferometer 2 is housed on the vertical lifting shaft 91, and the optical output path of the laser wave front interferometer 2 is provided with a detachable The CGH five-dimensional motion adjustment platform 3 of the holographic CGH component, the CGH five-dimensional motion adjustment platform 3 is located directly above the four-dimensional motion adjustment...

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Abstract

The invention discloses a multifunctional vertical zero overlapping scanning interferometry device which comprises a main control unit, a drive control circuit and an air floatation vibration isolation base. A stand column and a four-dimensional motion adjusting platform are arranged on the air floatation vibration isolation base, a vertical lifting shaft is arranged on the stand column, and a laser wave surface interferometer is arranged on the vertical lifting shaft. A detachable CGH five-dimensional motion combination adjusting platform is arranged on a light output path of the laser wave surface interferometer, the CGH five-dimensional motion combination adjusting platform is located over the four-dimensional motion adjusting platform, and the control end of the CGH five-dimensional motion combination adjusting platform and the control end of the four-dimensional motion adjusting platform are connected with the main control unit through the drive control circuit. And the control end of the laser wave surface interferometer is connected with the main control unit. According to the invention, high-precision and high-efficiency measurement of a large-aperture plane, a spherical surface and a convex aspheric surface can be realized, zero measurement of the plane, the spherical surface and the aspheric surface can be flexibly carried out, and high-efficiency and high-precision detection of a large-aperture optical surface shape is realized in combination with automatic control.

Description

technical field [0001] The invention belongs to the field of interference splicing measurement, and in particular relates to a multifunctional vertical zero-position overlapping scanning interferometry device, which is suitable for multifunctional vertical zero-position overlapping scanning interferometry of large-diameter planes, spherical surfaces, and convex aspheric surfaces. Background technique [0002] Due to the outstanding role of aspheric mirrors in simplifying the structure of optoelectronic information acquisition systems and reducing system quality, aspheric optical systems are widely used in civilian and military optoelectronic instruments. Large-aperture convex aspheric mirrors play an irreplaceable role as secondary mirrors in space and ground-based telescope systems. With the large number of applications of aspheric mirrors, the diameter and relative diameter are getting larger and larger, and the measurement problems of optical mirrors are becoming more and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30G01B9/02
CPCG01B11/30G01B9/02055
Inventor 陈善勇铁贵鹏陈威威戴一帆薛帅翟德德刘俊峰
Owner NAT UNIV OF DEFENSE TECH
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