A kind of on-chip integrated optical microcavity coupling structure and preparation method

Abstract

The embodiment of the invention discloses an on-chip integrated optical microcavity coupling structure and a preparation method. The coupling structure includes a substrate; an optical microcavity disposed on the substrate, a first cantilever beam and a second cantilever beam; the first cantilever beam includes a first support body, a second support body and a first cantilever beam, and the second cantilever beam includes The third support body, the fourth support body and the second cantilever, the optical microcavity is located between the first cantilever and the second cantilever; the first cantilever and the second cantilever are used to support the tapered optical fiber and the optical microcavity coupling both ends of the fiber. The technical scheme of the embodiment of the present invention keeps the relative position of the tapered optical fiber and the optical microcavity stable, thereby solving the problem of mechanical stability necessary for long-term measurement in the experiment, and the preparation process of the structure is different from that of the existing optical microcavity The preparation process is fully compatible and easy to prepare, which can provide a packaging idea to solve the mechanical stability for the future industrialization of optical microcavities.

Description

technical field [0001] Embodiments of the present invention relate to optical device technology, in particular to an on-chip integrated optical microcavity coupling structure and a preparation method. Background technique [0002] On-chip ultra-high quality factor silicon dioxide whispering gallery mode optical microcavity samples were prepared for the first time in 2003. This optical microcavity has the advantages of high Q value, low loss, and small mode volume, so it is a good experimental The platform is widely used by researchers in various projects. [0003] In order to effectively inject laser light into this whispering gallery mode optical microcavity, common coupling methods include prism coupling, fiber end face coupling, and tapered fiber coupling. Among them, tapered fiber coupling is the most commonly used by researchers, because its coupling efficiency can easily be higher than 90%, and the process of preparing tapered fiber is relatively simple and convenient...

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Problems solved by technology

[0005] The embodiment of the present invention provides an on-chip integrated optical microcavity coupling structure and preparation method, so that the relative position of the tapered optical fiber and the optical microcavity remains stable, thereby solving the mechanical stability problem necessary for long-term measurement in the experiment, and The preparation process of this structure is completely compatible with the preparation process of the existing optical microcavity, easy to prepare, and can provide a packaging idea to solve the mechanical stability for the future industrialization of the optical microcavity

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