MEMS galvanometer and optical system

A technology of micromirror and micromirror, which is applied in optics, optical components, instruments, etc., can solve the problems of reducing the frequency of resonant work of micromirror 4, increasing the weight of micromirror 4, and the adverse effects of temperature stability, so as to avoid fatigue Effects of failure, avoidance of adverse effects, and improvement of working life

Inactive Publication Date: 2021-02-02
SAIC MOTOR +1
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Problems solved by technology

[0005] but figure 1 In the shown MEMS oscillating mirror, since the excitation coil 3 is arranged on the surface of the micromirror 4, this will not only increase the weight of the micromirror 4, reduce the resonant frequency of the micromirror 4, and the heat generated by the excitation coil 3 during work will also It will adversely affect the temperature stability of the micromirror 4 scanning operation

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  • MEMS galvanometer and optical system
  • MEMS galvanometer and optical system
  • MEMS galvanometer and optical system

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Embodiment Construction

[0034] As described in the background technology, the MEMS vibrating mirror in the prior art, because the excitation coil is arranged on the surface of the micromirror, will bring many adverse effects to the normal operation of the MEMS vibrating mirror, specifically including:

[0035] 1. There are generally metal wires and dielectric materials on the rotating shaft of the mirror connected to the micromirror. These materials are deposited and prepared on the surface of the single crystal silicon rotating shaft by micromachining. The defects in these materials cause the mechanical failure of the micromirror during scanning. As the loss increases, the Q value of the mechanical resonance quality factor decreases, and the scanning angle becomes smaller; Q refers to the ratio of the mechanical energy stored by the MEMS galvanometer system at resonance to the mechanical energy consumed in one scanning cycle. Q is related to environmental damping, structure and materials of the syste...

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Abstract

The invention discloses an MEMS galvanometer and an optical system. The MEMS galvanometer enables an excitation coil, a signal input end and a signal output end to be disposed on an edge structure, and the excitation coil achieves the indirect micromirror drive according to a received excitation signal through mechanical coupling and mechanical amplification effects. The situation that heat generated by the excitation coil in the working process causes adverse effects on the temperature stability during micromirror scanning work is avoided, the problem of fatigue failure of the excitation coilduring rapid scanning is avoided, and the service life of the micromirror is prolonged. Similarly, the excitation coil is not directly arranged on the surface of the micromirror, so that the total weight of the micromirror during scanning is reduced, the scanning frequency of the micromirror is improved, and the high-frequency work of the micromirror is realized.

Description

technical field [0001] The present application relates to the technical field of micro-electro-mechanical systems, and more specifically, to a MEMS vibrating mirror and an optical system. Background technique [0002] The Micro-Electro-Mechanical System (MEMS), which emerged on the basis of micro-processing technology, has been widely used in automobiles, mobile phones and other fields. At present, the global output value of MEMS chips has exceeded 10 billion US dollars. Optical MEMS is an important direction of MEMS, and optical MEMS devices have many applications in optical information technology and optical communication technology. MEMS vibrating mirror, as an important optical micro-electromechanical system device, has broad applications in projection display, optical communication, 3D scanning and many other fields due to its small size, low cost, fast scanning frequency, precise driving and control, etc. Application prospects. [0003] According to the scanning moti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08G02B26/10
CPCG02B26/085G02B26/10
Inventor 王锦沈文江冯奇沙华露余晖俊宁文果王帅周鹏李智星高咏
Owner SAIC MOTOR
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