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Air layer coupling etalon

An etalon and air layer technology, applied in the field of filters, can solve the problems of large size, low yield, and high cost, and achieve the effect of simple assembly method, low sensitivity, and easy mass production

Pending Publication Date: 2021-01-19
FUZHOU PHOTOP QPTICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The existing double-cavity, triple-cavity and multi-cavity etalon products are mainly composed of air cavity and solid cavity etalon through a series of complex process combinations. The processing technology is complex and difficult, and the yield is low, the size is large, High cost, unable to achieve mass production and large-scale commercial use

Method used

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  • Air layer coupling etalon
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  • Air layer coupling etalon

Examples

Experimental program
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Effect test

Embodiment 1

[0028] Embodiment 1: The structure diagram of embodiment 1 of the present invention is shown in Figure 4 to 6, and Figure 4 is a single-cavity etalon 1, and Figure 5 is another single-cavity etalon 2, and two single-cavity etalons 1, 2 have The same or similar free spectral range, coating reflectance and transmission peak. Single-cavity etalons 1 and 2 belong to solid etalons, and the solid material can be one of silicon, optical glass or crystal, and the absorption of this material to a specific wavelength is very small; the two parallel polished surfaces of single-cavity etalons 1 and 2 Coated with a partially reflective film with the same reflectivity;

[0029] The effective light hole 21 of the single-cavity etalon 2 can be formed by various methods, including processes such as photolithographic mask or fixture shielding, coating, or photolithographic mask post-etching, to obtain a step layer 22 with a precise thickness. The thickness of the layer 22 is (2N+1) / 4 times of ...

Embodiment 2

[0031] Embodiment 2: The structural diagram of Embodiment 2 of the present invention is shown in Figures 7 and 8 .

[0032] Figure 7 shows single-cavity etalons 1, 2, and 3. The three single-cavity etalons 1, 2, and 3 have the same or similar free spectral range, coating reflectivity, and transmission peak. Single-cavity etalons 1, 2, and 3 belong to solid etalons, and the solid material can be one of silicon, optical glass, or crystal, and the absorption of this material for a specific wavelength is very small. The parallel polished surfaces are coated with a partially reflective coating with the same reflectivity.

[0033] The effective apertures 21 and 31 of the single-cavity etalon 2 and 3 can be formed by various methods, including processes such as photolithographic mask or fixture shielding and coating, or photolithographic mask post-etching, etc., to obtain mesa with precise thickness. Steps 22 and 32, the thickness of step layers 22 and 32 is (2N+1) / 4 times the centr...

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Abstract

The invention discloses an air layer coupling etalon which comprises more than two single-cavity etalon bodies with the same free spectral range, fineness and transmission peak, the single-cavity etalon bodies are sequentially attached and fixed together, and every two adjacent single-cavity etalon bodies are coupled through an air layer. The double-cavity, three-cavity or multi-cavity etalon hasthe advantages of low sensitivity (the spectrum changes along with the thickness of the coupled air layer), easiness in processing and mass production, small size, low cost and the like besides high fineness and transmission peak height flat top type of the corresponding double-cavity, three-cavity or multi-cavity etalon in the prior art.

Description

technical field [0001] The invention relates to the field of filters, in particular to an air layer coupled etalon. Background technique [0002] The etalon, also known as the Fabry-Perot etalon, is coated with a reflective film on two parallel planes, and the light is reflected multiple times between the two coated surfaces to form multi-beam equi-tilt interference, as shown in Figure 1 , when the optical thickness n*d of the etalon (where n is the refractive index of the medium, d is the thickness of the medium), the incident angle θ and the wavelength λ of the incident light satisfy 2n*d*cos(θ)=m*λ (where m is positive Integer), the transmission curve of the incident light will have a very high peak transmittance. According to the structure, the etalon can be divided into air-gap etalon and solid etalon: the air-gap etalon is composed of a front piece, a back piece and a spacer in the middle, and the front piece and the back piece form an air gap through the spacer. Int...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28
CPCG02B5/285
Inventor 贾旭于光龙闫青艳任策陈海峰
Owner FUZHOU PHOTOP QPTICS CO LTD
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