Three-dimensional integrated system based on solar energy, and preparation method thereof

Abstract

The invention provides a three-dimensional integrated system based on solar energy, and a preparation method thereof. The three-dimensional integrated system comprises a nano-capacitor structure, a solar cell, a first silicon through hole structure and a second silicon through hole structure, wherein the nano-capacitor structure is installed at the bottom of the solar cell, and the first silicon through hole structure and the second silicon through hole structure are arranged on the left side and the right side of the top of the solar cell respectively. The solar cell and the nano-capacitor structure are integrated together through the first silicon through hole structure and the second silicon through hole structure and are electrically connected, so that the solar cell stores generated electric energy in the nano-capacitor structure; and the nano-capacitor structure and the solar cell share one electrode, power is generated by collecting solar energy and stored in the nano-capacitorstructure, continuous and stable energy output can be provided, meanwhile, the system integration degree is high, and the system is high in reliability, small in size and easy in miniaturization.

Description

technical field [0001] The invention relates to the technical field of integrated circuits, in particular to a three-dimensional integrated system based on solar energy and a preparation method. Background technique [0002] In addition to the miniaturization technology development route of devices led by Moore's Law, functional micro-nano devices are integrated to form a multi-functional micro-nano device system, and realize human health, environmental monitoring, human-computer interaction, personal electronics and biological diagnosis. The importance of large-scale networks has become increasingly prominent. Integrating embedded energy harvesting devices to form intelligent self-powered systems is an important aspect of electronic device development. Self-powered devices can convert energy sources in the environment, such as thermal energy, solar energy, and mechanical energy, into electrical energy. Among them, solar cells have a good prospect in self-supply, which can...

AI Technical Summary

Problems solved by technology

However, batteries are generally independent energy supply components, which are difficult to directly integrate with other devices

In addition, another disadvantage of the battery is its limited discharge efficiency

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