A kind of production device and production method of electronic grade hydrofluoric acid
A technology of electronic grade hydrofluoric acid and production equipment, applied in separation methods, chemical instruments and methods, perfluorocarbon/hydrofluorocarbon capture, etc., can solve waste environmental pollution, improve preparation cost, and output Low efficiency and other problems, to achieve the effect of reducing the purification process, high economic benefits and environmental protection, and improving utilization
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[0032] as attached figure 1 As shown, a production device for electronic grade hydrofluoric acid provided by the present invention includes a purification system, a re-absorption system and a first tail gas absorption system;
[0033] The purification system includes a raw material tank 11, an evaporator 12 whose inlet is connected to the bottom end of the raw material tank 11, a purification tower 13 whose bottom end is connected to the outlet of the evaporator 12, and an absorption tower 14 connected to the top of the purification tower 13 at the bottom end, which is connected to the absorption tower 14. The bottom end of the absorption tower still storage tank 15, the bottom end of the absorption tower still storage tank 15 is connected with the first conveying pump 16, the ultrapure filtering device 17 and the filling device 18 in sequence, and the bottom end of the purification tower 13 is connected with a residual liquid storage tank 19.
[0034] The operation process of...
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