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Thermo-optical phase shifter

An optical phase shifter and phase shifter technology, applied in the direction of instruments, optics, nonlinear optics, etc., can solve the problems of low phase shift efficiency, achieve the effects of improving efficiency, realizing optical path control, and reducing loss

Inactive Publication Date: 2020-11-27
UNITED MICROELECTRONICS CENT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the phase shifting efficiency of thermo-optic phase shifters in the prior art is low

Method used

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Embodiment Construction

[0032] As mentioned above, in the prior art, a thermo-optical phase shifter can be used to modulate the phase of light. However, the phase shifting efficiency of the thermo-optic phase shifter in the prior art is low.

[0033] In an existing technical solution, the heating efficiency of the heating unit can be improved by adding heat insulation grooves on both sides of the waveguide or making a cantilever beam structure, thereby improving the phase shifting efficiency of the thermo-optic phase shifter.

[0034] However, the inventors of the present invention have found through research that the above scheme reduces the modulation speed of the thermo-optic phase shifter, increases the difficulty of the process and the overall size of the device, and causes the problem that the volume of the phase shifter becomes larger, which is not conducive to the phase shifter. Use in networks such as lidar on silicon substrates, photonic artificial intelligence, etc.

[0035] In another ex...

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PUM

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Abstract

The invention discloses a thermo-optical phase shifter, which includes a transmission waveguide, a heating unit and at least one grating structure, wherein the transmission waveguide is used for optical transmission; the heating unit is thermally coupled to the transmission waveguide for heating at least part of the transmission waveguide to change the phase of light passing through the transmission waveguide; and the at least one grating structure is formed on the inner side wall or the outer surface of the transmission waveguide and is used for reflecting the light in the transmission waveguide at least once so as to enable the light to pass through the heated transmission waveguide twice or more than twice. According to the phase shifter, light can be repeatedly heated under the condition that the size of the phase shifter is not influenced, so that the heating frequency of the light is increased by utilizing mode resonance, and the phase shifting efficiency is effectively improvedunder the condition that the size of the phase shifter is not increased.

Description

technical field [0001] The invention relates to the field of optoelectronic technology, in particular to a thermo-optic phase shifter. Background technique [0002] With the development of semiconductor technology, the size of chips has been reduced to the limit. In order to further develop chips with higher performance and break through Moore's Law, silicon-based optoelectronic chips that can improve performance without reducing the size of the device have emerged. Silicon-based optoelectronic chips generally modulate the intensity, amplitude, frequency, phase, polarization, and propagation direction of light through electro-optic, thermo-optic, and acousto-optic. Among them, the thermo-optic phase shifter, which uses thermo-optic to realize the phase change of light, is a commonly used functional device in silicon-based chips. [0003] However, the phase shifting efficiency of the thermo-optic phase shifter in the prior art is low. Contents of the invention [0004] T...

Claims

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Application Information

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IPC IPC(8): G02F1/01
CPCG02F1/0147G02F1/011G02F1/0102
Inventor 刘胜平田野李强赵洋王玮冯俊波郭进
Owner UNITED MICROELECTRONICS CENT CO LTD
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