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Servo control circuit and quartz flexible accelerometer based thereon and manufacturing method

An accelerometer and servo control technology, applied in the direction of measuring acceleration, speed/acceleration/shock measurement, instruments, etc., can solve problems such as poor anti-interference ability, achieve the effect of improving measurement accuracy, improving work stability, and avoiding damage

Active Publication Date: 2022-03-01
XIAN MICROELECTRONICS TECH INST
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Problems solved by technology

[0005] The purpose of the present invention is to overcome the shortcomings of the poor anti-interference ability of the quartz flexible accelerometer in the above-mentioned prior art, and provide a servo control circuit and a quartz flexible accelerometer based on it and its manufacturing method

Method used

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  • Servo control circuit and quartz flexible accelerometer based thereon and manufacturing method
  • Servo control circuit and quartz flexible accelerometer based thereon and manufacturing method
  • Servo control circuit and quartz flexible accelerometer based thereon and manufacturing method

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Embodiment Construction

[0045] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0046] It should be noted that the terms "first" and "second" in the description and claims of the present invention and the above drawings are used to distinguish similar objects, but not necessarily used to describe a specific sequence or sequence. It is to be understood that the data so used are interchangeable under appropriate ...

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Abstract

The invention belongs to the technical field of hybrid integrated circuits and discloses a servo control circuit and a quartz flexible accelerometer based on it and a manufacturing method. The servo control circuit includes a differential capacitance detector, a current integrator, and an RC low-pass filter , transconductance / compensation amplifier, resistance-capacitance feedback network and capacitance; the quartz flexible accelerometer includes connecting the quartz meter head and the servo assembly; the quartz meter head includes a shell, a pendulum piece and a coaxial differential capacitance sensor and Torque, the servo assembly includes a shell, the shell is connected to the shell, a substrate is arranged between the shell and the shell, one side of the substrate is connected to the shell, and the other side is provided with a servo control circuit and a cover plate covering the outside of the servo control circuit; the shell A first binding post and a plurality of second binding posts are arranged on it, a gold layer is electroplated on the first binding post, and the first binding post is connected to the thick-film pad connected to the capacitor through gold wire bonding. The shortcoming of poor anti-interference ability of the existing quartz flexible accelerometer is solved, and the measurement accuracy of the quartz flexible accelerometer is improved.

Description

technical field [0001] The invention belongs to the technical field of hybrid integrated circuits, and relates to a servo control circuit, a quartz flexible accelerometer based on the same and a manufacturing method. Background technique [0002] Inertial navigation technology is an autonomous navigation technology that does not rely on external information and does not radiate external energy. It is continuous and concealed, and it is a carrier motion information perception technology without environmental restrictions. Its basic working principle is based on Newton's laws of mechanics, by measuring the acceleration of the carrier in the inertial reference system, integrating the time, and calculating the speed, yaw angle and position information of the carrier in the navigation coordinate system. As the core instrument of the inertial navigation system, the quality of the accelerometer index directly affects the overall performance of the control system. Among them, the q...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 徐鑫万欢欢张明阮晓明刘发夏瑱超
Owner XIAN MICROELECTRONICS TECH INST
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