Acceleration sensor based on suspension two-dimensional material and heterogeneous layer suspension mass block

Abstract

The invention discloses an acceleration sensor based on a suspension two-dimensional material and a heterogeneous layer suspension mass block, and the acceleration sensor is characterized in that thesuspension two-dimensional material and the heterogeneous layer suspension mass block are used as a spring-mass block system and a transconductance device structure; materials used by the suspension two-dimensional material and the heterogeneous layer mainly comprise graphene, hexagonal boron nitride, molybdenum disulfide, tungsten diselenide, molybdenum diselenide, tungsten disulfide, platinum diselenide and other transition metal disulfide compounds. The external applied acceleration (such as along the Z-axis direction) deforms and strains the suspended two-dimensional material and the heterogeneous layer of the suspended mass (such as along the Z-axis), so that the resistances of the piezoresistive suspended two-dimensional material and the heterogeneous layer are changed, and the applied acceleration can be detected. The sensitivity, the resolution, the detection limit and the yield of the acceleration sensor are greatly improved by using a large suspended mass block, a two-dimensional material with a high piezoresistance coefficient and a heterogeneous layer and using the hexagonal boron nitride as a packaging layer, and the degradation of the performance of the acceleration sensor is avoided.

Description

technical field [0001] The invention relates to the field of acceleration sensors, in particular to an acceleration sensor based on suspended two-dimensional materials and heterogeneous layer suspended masses. Background technique [0002] MEMS accelerometers are used in a wide range of applications, including navigation systems, aerospace, automotive driving systems, structure inspection, industrial control, Internet of Things, smartphone-based consumer electronics, wearable devices, biomedical implants, and more. A long-term goal of MEMS sensors, including accelerometers, in many applications is to continue to reduce device size and improve device performance. A typical acceleration sensor usually includes a suspended mass structure, and the mass mass is displaced with the applied acceleration, thereby causing changes in the resistance or capacitance of the sensing structure of the acceleration sensor. At present, the size of a typical acceleration sensor is several squar...

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Problems solved by technology

[0008] However, the acceleration sensor based on double-layer stacked chemical vapor deposition graphene has insufficient sensitivity, relatively low resolution, insufficient detection limit, poor device stability, and poor device resistance to surrounding environments (such as humidity, gas) and noise signals. Yield needs to be further improved

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