Nanometer positioning control system for micro-displacement platform

A technology of nano-positioning and control system, applied in the direction of using optical devices, measuring devices, instruments, etc.

Active Publication Date: 2020-11-03
HARBIN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in actual non-contact measurement, it is often necessary to keep the distance between the scanning probe and the surface of the material to be measured within the range of tens to hundreds of nanometers, and the traditional displacement control method is difficult to achieve Surface distance for positioning control

Method used

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  • Nanometer positioning control system for micro-displacement platform
  • Nanometer positioning control system for micro-displacement platform

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Experimental program
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specific Embodiment approach 1

[0019] Specific embodiment one, combined with Figure 1-2 To explain this embodiment, a nano-positioning control system for a micro-displacement platform of this embodiment includes a positioning sensor 2-1, a scanning probe 2-2, a scanning platform 2-3, a controller 2-4, and a host computer 2. -5. The positioning sensor 2-1 and the scanning probe 2-2 are assembled together, the positioning sensor 2-1 is connected with the upper computer 2-5 through a signal line, and the scanning probe 2-2 is fixed on the scanning platform 2-3 , The scanning platform 2-3 and the controller 2-4 establish signal transmission to control the movement of the scanning platform 2-3, the controller 2-4 is connected with the upper computer 2-5, and the whole system constitutes a closed-loop control system of nano positioning. During the nano-positioning process, when the scanning probe 2-2 and scanning platform 2-3 are moved to the surface of the material to be measured 2-6 within 1 micron under the co...

specific Embodiment approach 2

[0020] Specific implementation mode two, combined with Figure 1-2 This embodiment will be described. In this embodiment, a nano-positioning control system for a micro-displacement platform, the positioning sensor 2-1 includes a light source 1-1, a prism 1-2, a metal film 1-3 and a light intensity receiver 1-4, the working surface of the prism 1-2 is plated with a metal film 1-3, the light source 1-1 emits laser light incident on the metal film 1-3 through the prism 1-2, the metal film 1-3 reflects the light source 1-1 The laser light is received by the light intensity receiver 1-4. In this way, the nano positioning sensor 2-1 is a positioning sensor. Its working principle is that when the incident light wave vector matches the surface plasmon wave (SPW) wave vector of the metal coating (gold or silver) on the prism surface, the reflected light intensity will be Suddenly decrease. The present invention regards the air layer between the scanning probe and the surface of the ma...

specific Embodiment approach 3

[0021] Specific implementation mode three, combined with Figure 1-2 To illustrate this embodiment, in a nano-positioning control system for a micro-displacement platform of this embodiment, the metal film 1-3 is a gold film or a silver film.

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Abstract

The invention relates to a nanometer positioning control system for a micro-displacement platform. When a scanning probe and a scanning platform are controlled by a controller to move to the surface of a to-be-detected material to be within 1 micron, an SPR signal of the positioning sensor is changed, the distance d between two planes is calculated in real time through the SPR signal; when d meetsthe scanning distance requirement, the sensor sends a feedback signal which is transmitted to the upper computer, the upper computer transmits the signal to the controller, and the signal controls the scanning platform to stop moving, thereby achieving the purpose of nano-positioning according to the distance between the scanning probe and the surface of the to-be-measured material. Nanoscale positioning closed-loop control over the distance between the scanning probe and the material to be measured can be achieved, and therefore non-contact scanning measurement of the scanning probe is achieved.

Description

Technical field [0001] The invention relates to the technical field of nano-positioning, in particular to a nano-positioning control system for a micro-displacement platform. Background technique [0002] Nano-positioning technology is a cutting-edge science, widely used in super-finishing, microelectronics engineering, bioengineering, nanotechnology, and is one of the key technologies in the field of engineering technology. For the nano positioning and scanning platform control system, due to its inherent hysteresis, creep, loadability, and low positioning resolution and positioning accuracy, this will directly affect the nano positioning accuracy of the scanning platform. In the past, various algorithms were mainly used to realize the nano-displacement control of feedforward, feedback and hybrid methods on the scanning platform. However, in actual non-contact measurement, it is often necessary to keep the distance between the scanning probe and the surface of the material to b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/06G01B11/02G01N21/552
CPCG01B11/02G01B11/0616G01N21/554
Inventor 杨志韬宋显华
Owner HARBIN UNIV OF SCI & TECH
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