Semiconductor-grade straight-pull re-feeding cylinder

Abstract

The invention provides a semiconductor-grade direct-pull re-feeding cylinder, which comprises a cylinder body, a molybdenum rod and a main quartz umbrella arranged at the lower end of the cylinder body. An auxiliary quartz umbrella is further arranged on the molybdenum rod and located above the main quartz umbrella. The main quartz umbrella is also provided with a quartz cylinder which is used forisolating the molybdenum rod from the silicon material and penetrates through the auxiliary quartz umbrella; the upper end face of the cylinder body is provided with a positioning assembly used for adjusting the lifting positions of the main quartz umbrella and the auxiliary quartz umbrella. The re-feeding cylinder buffers the falling speed of the silicon material, reduces the impact of the silicon material on the main quartz umbrella, and reduces the risk of splashing of the silicon material; the descending distance is fixed so as to adjust the parachute opening height and the blanking speedof the re-feeding cylinder; the molybdenum rod is prevented from being in direct contact with the silicon material, the purity of the silicon material entering the re-feeding cylinder is ensured, andthe quality of a Czochralski single crystal is improved; the strength of the re-feeding cylinder is improved, the service life is prolonged, and the preparation cost of the re-feeding cylinder is reduced.

Description

technical field [0001] The invention belongs to the technical field of semiconductor Czochralski single crystal auxiliary equipment, and in particular relates to a semiconductor-level Czochralski complex throwing cylinder. Background technique [0002] In the process of semiconductor-grade single crystal preparation, the re-casting cylinder is a commonly used and important feeding tool. The structure of the re-casting cylinder directly affects the feeding amount and drawing quality of silicon material. Chinese published patent CN210636091U proposes a new type of re-injector for CZ single crystal, including a re-injection cylinder, a quartz umbrella and a fixed frame. The re-injection cylinder has a wide upper and lower narrow structure. The re-injection cylinder with this structure has the following problems: [0003] First of all: for a single quartz umbrella set at the lower end of the re-feeding cylinder, the impact force of the falling silicon material is relatively larg...

AI Technical Summary

Problems solved by technology

[0008] The invention provides a semiconductor-grade straight-pull compound throwing cylinder, which solves the technical problems that the compound throwing cylinder in the prior art is prone to silicon splashing, silicon material contamination and short service life.

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