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Filter and manufacturing method thereof, multiplexer and communication equipment

A technology of filters and resonators, which is applied in the field of communication equipment, filters and their manufacture, and multiplexers, and can solve problems affecting the performance of resonators

Active Publication Date: 2020-10-23
ROFS MICROSYST TIANJIN CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, changes in the thickness ratio of the electrode layer and the piezoelectric layer will affect the performance of the resonator, such as loss characteristics, electromechanical coupling coefficient characteristics, etc.

Method used

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  • Filter and manufacturing method thereof, multiplexer and communication equipment
  • Filter and manufacturing method thereof, multiplexer and communication equipment
  • Filter and manufacturing method thereof, multiplexer and communication equipment

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Embodiment Construction

[0035] In the embodiment of the present invention, the thickness ratio of the electrode layer and the piezoelectric layer in the resonator is limited within a certain range. Using this ratio range can not only eliminate the influence of high-order resonance, but also control the performance of the filter such as insertion loss and bandwidth. The deterioration is within an acceptable range, which will be described in detail below.

[0036] figure 2 A cross-sectional view of a resonator provided for an embodiment of the present invention. figure 2 As shown, the resonator includes an upper electrode 1 , a piezoelectric layer 2 , a lower electrode 3 and a substrate 4 which are stacked. In the embodiment of the present invention, the thickness ratio of the electrode layer and the piezoelectric layer ranges from 0.6 to 2.6, preferably 0.7 to 2.2, wherein the thickness of the electrode layer is the sum of the thicknesses of the upper electrode and the lower electrode.

[0037] ...

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Abstract

The invention relates to the technical field of filters, in particular to a filter, a manufacturing method thereof, a multiplexer and communication equipment. In the filter, the thickness ratio between the electrode layer and the piezoelectric layer of the resonator is limited within a certain numerical range, and the filter with the structure not only can eliminate the influence of high-order resonance, but also can control the deterioration of performances such as insertion loss, bandwidth and the like of the filter within an acceptable range.

Description

technical field [0001] The invention relates to the technical field of filters, in particular to a filter, a manufacturing method thereof, a multiplexer, and a communication device. Background technique [0002] In recent years, the miniaturization and high-performance trend of communication equipment has accelerated, which poses higher challenges to the RF front-end. In the RF communication front end, on the one hand, miniaturization is achieved by reducing the size of the chip and package substrate, and on the other hand, better performance is achieved by reducing loss sources and better resonator matching design. In the existing filter structure, there are many passive components for matching, and at the same time, it is necessary to introduce more inductance, capacitance, coupling and other structures to improve specific performance such as roll-off insertion loss. [0003] A typical structure of an ordinary filter is as figure 1 as shown, figure 1 is a schematic diag...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/02H03H9/54H03H9/70
CPCH03H3/02H03H9/54H03H9/70
Inventor 蔡华林庞慰
Owner ROFS MICROSYST TIANJIN CO LTD
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