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Component service life monitoring method and system

A monitoring system and component technology, applied in the field of component life monitoring methods and systems, can solve the problems of consuming a lot of manpower and material resources, complicated information, and difficulty in information preservation and management, so as to prevent the use of invalid components and save manpower and material resources. Effect

Pending Publication Date: 2020-10-16
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
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AI Technical Summary

Problems solved by technology

[0005] First, there are many types and quantities of components, and the information to be recorded is complicated. This not only requires a lot of manpower and material resources, but also makes it difficult to store and manage these information
[0006] Second, it is difficult to achieve automatic management of components such as classified management, dynamic monitoring, and information configuration

Method used

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  • Component service life monitoring method and system
  • Component service life monitoring method and system
  • Component service life monitoring method and system

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Embodiment Construction

[0047] In order to enable those skilled in the art to better understand the technical solution of the present invention, the component life monitoring method and system provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0048] Such as figure 1 Shown is the first flow chart of the component life monitoring method provided by the embodiment of the present invention, specifically, figure 1 The illustrated component lifetime monitoring method includes the following steps:

[0049] S1: Receive and store attribute information of components, which includes usage events and current life values.

[0050] S2: Real-time monitoring whether the use event is triggered; if yes, execute step S3; if not, return to step S2.

[0051] Specifically, the use event is a related event bound for each action that affects the life of the component. When the action that affects the life of the component is executed, the use event will be t...

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Abstract

The invention provides a component service life monitoring method and system, and the method comprises the following steps: S1, receiving and storing attribute information of a component, and the attribute information comprising a use event and a service life current value; S2, monitoring whether a use event is triggered or not in real time, if YES, executing the step S3, and otherwise, returningto the step S2; and S3, accumulating the current life value. According to the invention, manpower and material resources are saved, and automatic management of components is realized.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a method and system for monitoring the lifetime of components. Background technique [0002] Semiconductor equipment often contains a large number of components, which form a complete hardware device after a certain design and assembly. When the equipment is put into production, once a certain component in the equipment is abnormal, it may cause the entire equipment to fail to process, or even cause all the process chips to be scrapped, casualties, etc., which will bring unpredictable losses to the manufacturer. [0003] Since most components have a certain lifespan, based on the short board effect, the lifespan of many components determines the operating efficiency and reliability of semiconductor equipment. In order to prevent the operation of the entire equipment from being affected by the life of the components, people often replace the components before they reach...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26G06F16/23G06F16/24
CPCG01R31/2642
Inventor 周法福黄扬君肖托
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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