A sub-area control system and control method for a chip inserter

Abstract

The invention discloses a sub-area control system for a wafer inserting machine, which includes a flower basket transfer station control unit, a silicon wafer transfer station control unit, a robot station control unit, and a lateral movement station control unit; the control unit of one of the stations The main control unit, the input end of the power supply of the main control unit is used to connect the external power supply, and the output end of the power supply of the main control unit is respectively connected with the power supplies of other station control units; Communication links to form a ring network. The invention also discloses a control method, which includes: in the initial state, start each station control unit with one key; when a certain station control unit fails, the faulty station control unit will automatically jump out and enter the fault state, Other station control units will not be affected; after the troubleshooting is completed, restart this station control unit and enter the automatic mode. The invention has the advantages of partition independent control, test and high operating efficiency.

Description

technical field [0001] The present invention mainly relates to the technical field of inserting machines, in particular to a sub-area control system and control method for inserting machines. Background technique [0002] The ten-tube inserting machine is the supporting equipment for ten-tube PECVD. It has two main functions, feeding and discharging. The feeding process is flower basket pick-up → robot pick-up → graphite boat insertion → graphite boat into PE; the output process is graphite boat out of PE → graphite boat pick-up → robot insertion → flower basket insertion. [0003] The completion of the whole process requires four stations, flower basket circulation, silicon wafer circulation, robot insertion and removal of wafers, and graphite boat lateral movement. The flower basket circulation station is composed of full flower basket in, full flower basket out, manual empty flower basket, NG piece into empty flower basket, NG piece out of full flower basket, empty flowe...

AI Technical Summary

Problems solved by technology

[0004] When assembling and debugging the whole set of control system, it is necessary to complete the power supply of the whole set of equipment and the network to complete the equipment point-to-point and test work; if a certain station fails, the entire equipment will be shut down, switch to manual, and then deal with the fault. Automatically, greatly reducing production efficiency

At the same time, the equipment failure of a certain station will cause the overall shutdown of the equipment, which will affect the work of the normal station, reduce the work efficiency, and greatly reduce the output. If there is a fault that needs to be re-initialized, the delay will be more time, and the entire station needs to be manually cleaned. The current state of the equipment is time-consuming and labor-intensive, which seriously affects the production capacity of the equipment

In addition, after the overall shutdown, it may be necessary to initialize the overall equipment, which is time-consuming and labor-intensive.

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