Rotary high-speed automatic alignment exposure equipment
An automatic alignment and rotation technology, which is applied in micro-lithography exposure equipment, photomechanical equipment, photo-plate-making process exposure equipment, etc., can solve problems such as low production capacity and precision, long machine length, and large floor space. Achieve the effects of reducing failure probability and cost, improving productivity and accuracy, and reducing floor space
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[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0027] Please refer to Figure 1-3 , the rotary high-speed automatic alignment exposure equipment includes a frame 100, a rotating platform 200, a platform drive module 300, a first alignment exposure module 400, a second alignment exposure module 500, a turnover module 600 and an upper and lower Material module 700. Among them, the platform driving module 300 is used to drive the rotating platform 200 to rotate, the first alignment exposure module 400 and th...
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