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Optical measurement system

An optical measurement system and optical unit technology, applied in optical radiation measurement, measurement device, color/spectral characteristic measurement, etc., can solve the problems of increased system complexity and reduced grating light energy utilization, and achieve reduced complexity and easy Engineering realization, the effect of reducing the number of parts

Pending Publication Date: 2020-08-04
南京引创光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The use of beam splitting prisms and gratings will increase the complexity of the system, and at the same time reduce the utilization rate of light energy due to the diffraction efficiency of the gratings

Method used

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Embodiment 1

[0031] This embodiment provides a Figure 1-2Optical measurement system shown. The optical measurement system includes a light source (the light source in this embodiment is a linear light source 1), a first optical unit, a second optical unit, a dispersion element (the dispersion prism 12 is used as a preferred solution in this embodiment for illustration), a linear array detector Device 16, area array detector 14, main control system 17. After the light beam emitted by the continuous-spectrum linear light source 1 is transmitted through the first optical unit, the emitted light beam is split by the second optical unit. The light emitting side of the first optical unit can also be provided with a first slit 5, the light beam emitted by the light source is transmitted through the first optical unit and then irradiated on the first slit 5, and the light emitting surface of the light source and the first slit 5 form an object image conjugate relationship, the light beam exits ...

Embodiment 2

[0037] The dispersive element used in the spectral decoding part of the present invention can be a single dispersive optical element, or a combination of dispersive optical elements. When the dispersive element is a combination of dispersive optical elements, the dispersive element is made of two, three, or multiple optical elements glued together, or the combination of mutually separated optical elements has a dispersion function. Taking the dispersion prism 12 as an example, the dispersion prism 12 may be a single prism or a combination of prisms. It is sufficient that the formed combination has a dispersion function.

[0038] Among them, this embodiment provides a image 3 As an alternative solution shown, the dispersion prism 12 in this embodiment is formed by cementing two prisms (ie, the first cemented dispersion unit 121 and the second cemented dispersion unit 122 ). The structure in which the dispersion prism 12 is composed of three or more prisms glued together will...

Embodiment 3

[0041] This embodiment provides a Figure 5 Optical measurement system shown. The composition of this optical measurement system is basically the same as Embodiment 1, the main difference is that the position of the optical prism 6 in the double telecentric objective lens unit is set differently, and the dichroic prism 6 can also be placed in the middle of the first objective lens 7 and the second objective lens 9 Location.

[0042] In this embodiment, the preferred structure of the second optical unit is a bi-telecentric objective lens unit comprising a beam splitter 6 (such as a beam splitter prism), a first objective lens 7 and a second objective lens 9, and the different wavelengths emitted by the second objective lens 9 The beam has axial dispersion in the direction of the optical axis, so that the line lengths corresponding to different heights are the same. The beam splitter 6 is arranged between the first objective lens 7 and the second objective lens 9 , and the bea...

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Abstract

The invention discloses an optical measurement system. The optical measurement system comprises a light source, a first optical unit, a second optical unit, a dispersion element, a linear array detector, an area array detector and a main control system. A light beam emitted by the light source is transmitted by the first optical unit, then the emitted light beam is split by the second optical unit, and a light beam penetrating through the second optical unit is focused on a measured object along the optical axis direction. The light beam reflected or scattered by the measured object is partially reflected by the second optical unit and then is focused on the dispersion element, the front surface of the dispersion element reflects part of light beams before dispersion to the linear array detector, and part of light beams penetrating through the front surface of the dispersion element are focused on the area array detector. The light waves at different angles correspond to different imaging heights, and the main control system decodes the information of the measured object according to a pre-stored algorithm. According to the invention, the gray level image and the height informationof the measured object can be obtained at the same time, the complexity of the system is reduced, and the stability is improved.

Description

technical field [0001] The present invention relates to an optical measurement system, in particular to an optical measurement system used for surface profile and topography, micro-nano level fine structure, displacement in semiconductor industry and automobile manufacturing industry, thickness of optical glass and biological film, paint and printing industry Optical measurement system for color and other measurements. Background technique [0002] Spectral confocal has many applications in the measurement of displacement, three-dimensional shape, and thickness of transparent substances. As early as the 1970s, scholar Courtney Pratt and others proposed a technology that can use the chromatic aberration of the microscope objective lens to detect surface topography. ; Later, Molesini and other scholars used a set of specially designed lenses for chromatic aberration to build a surface profiler based on the principle of spectral confocal; Boyde.A and others promoted it to the c...

Claims

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Application Information

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IPC IPC(8): G01J3/28G01J3/50G01J3/12G01B11/24G01B11/06G01N21/17G01N21/25G01N21/27
CPCG01J3/2823G01J3/2803G01J3/502G01J3/12G01B11/24G01B11/0625G01N21/251G01N21/27G01N21/17G01N2021/178G01J2003/2813G01J2003/1208
Inventor 庆祖林
Owner 南京引创光电科技有限公司
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