An electromagnetic double mirror mems optical switch

Abstract

The invention discloses an electromagnetic double-mirror MEMS optical switch, which comprises a supporting frame. The top and bottom of the supporting frame are respectively provided with a top plane driving coil and a bottom plane driving coil, and the central parts of the top plane driving coil and the bottom plane driving coil The top permalloy iron core and the bottom permalloy iron core are respectively provided. The inner wall of the middle part of the supporting frame is connected with left double cantilever beams and right double cantilever beams. The elastic platform, the top and the bottom of the elastic platform are respectively provided with an upper light reflection micromirror and a lower light reflection micromirror, and a central through hole is horizontally pierced on the elastic platform. The electromagnetic double-mirror MEMS optical switch of the present invention attracts the elastic platform to move up and down through the electromagnetic force generated by the bottom plane driving coil and the top plane driving coil, thereby completing the switching of three optical paths, and has the characteristics of fast and stable response and good integration ability .

Description

An electromagnetic double mirror MEMS optical switch technical field [0001] The present invention relates to a kind of electromagnetic dual-mirror MEMS optical switch, belonging to the technical field of optical switches. Background technique [0002] Optical fiber communication has been developed since the 1980s and plays a very important role in the digital information age. With the development of daily applications such as virtual reality, the Internet of Things, and high-definition video live broadcast, as well as national priorities such as electricity, transportation, and aerospace, The network upgrade in the department, the current communication technology has higher and higher requirements for bandwidth, seeking a large-capacity network has become a the main research object. Optical fiber network with its huge capacity, excellent transparency, wide compatibility and good expansion It has become the mainstream communication network in the current era. [0003] ...

AI Technical Summary

Problems solved by technology

[0005] Most of the common MEMS optical switches adopt the dual optical path mode shown in patent CN102928977A and patent CN208079039U. Although the energy consumption is small and the response is fast, there is still room for further improvement in the integration capability. The current dual optical path MEMS optical switch array, Once an optical switch failure occurs, it cannot be dealt with in time

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