Electromagnetic type double-reflector MEMS optical switch

Abstract

The invention discloses an electromagnetic type double-reflector MEMS optical switch comprising a support frame, a top plane driving coil and a bottom plane driving coil are respectively arranged at the top and the bottom of the support frame; a top permalloy iron core and a bottom permalloy iron core are respectively arranged at the central parts of the top plane driving coil and the bottom planedriving coil; a left double-cantilever beam and a right double-cantilever beam are connected to the inner wall of the middle of the supporting frame, a magnetic elastic platform is connected betweenthe left double-cantilever beam and the right double-cantilever beam, an upper light reflection micro-mirror and a lower light reflection micro-mirror are arranged in the center of the top and the center of the bottom of the elastic platform respectively, and a central through hole is horizontally formed in the elastic platform in a penetrating mode. According to the electromagnetic type double-reflector MEMS optical switch, the elastic platform is attracted to move up and down through electromagnetic force generated by the bottom plane driving coil and the top plane driving coil so that switching of three optical paths is completed, and the electromagnetic type double-reflector MEMS optical switch has the characteristics of being rapid and stable in response and good in integration capacity.

Description

technical field [0001] The invention relates to an electromagnetic double-mirror MEMS optical switch, which belongs to the technical field of optical switches. Background technique [0002] Optical fiber communication has been developed since the 1980s and plays a very important role in the digital information age. With the development of daily applications such as virtual reality, the Internet of Things, and high-definition video live broadcasting, as well as the network upgrades of key national departments such as electric power, transportation, and aerospace, the current communication technology has higher and higher requirements for bandwidth, and a large-capacity network is sought became the main research object. With its huge capacity, excellent transparency, wide compatibility and good scalability, optical fiber network has become the mainstream communication network in the current era. [0003] Optical signals need to be constantly exchanged during transmission, an...

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Problems solved by technology

[0005] Most of the common MEMS optical switches adopt the dual optical path mode shown in patent CN102928977A and patent CN208079039U. Although the energy consumption is small and the response is fast, there is still room for further improvement in the integration capability. The current dual optical path MEMS optical switch array, Once an optical switch failure occurs, it cannot be dealt with in time

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