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Aluminum-scandium alloy target with high scandium content and preparation method thereof

An alloy target, aluminum scandium technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, can solve the problems of easy oxidation of metal scandium powder and aluminum powder, affecting the purity of products, limitation of use scope, etc. High ductility, wide composition range, fine grain size effect

Active Publication Date: 2020-07-28
HUNAN RARE EARTH METAL MATERIAL RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the preparation methods disclosed in the above-mentioned prior art all need to use expensive metal powder as raw material, the cost is high, and metal scandium powder and aluminum powder are easy to oxidize, and the oxygen content is high, which affects the purity of the product.
Moreover, although the powder metallurgy method can prepare aluminum-scandium alloys with high scandium content, there are many pores in the powder sintered alloy. Although the material is very dense as a whole, these pores will still cause many disadvantages to the target sputtering process and film quality. Impact
[0005] The Chinese patent CN104805406A (public date 2015.07.29) in the prior art discloses an aluminum-scandium rotating target and its preparation method, and specifically discloses the use of an arc spraying method to spray an alloy bottom layer on a stainless steel substrate containing an alloy bottom layer Use the controlled atmosphere cold spraying method to spray aluminum scandium powder to prepare the rotating target; the thickness of the aluminum scandium rotating target prepared by the above method is only 3-15 mm, and the density is 97%, and its application range is also limited, that is, the application is limited

Method used

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preparation example Construction

[0025] A preferred embodiment of the present invention provides a method for preparing an aluminum-scandium alloy target with high scandium content. The method includes the steps of alloying smelting, powder making, pre-pressing, vacuum sintering, hot forging, hot rolling and machining. Specifically, include the following steps:

[0026] (1) Alloying smelting: select metal aluminum with a purity of 99.99% or more and metal scandium with a purity of 99.9% or more, and the mass percentage content of metal scandium is 35% to 80%, and the mass percentage content of metal aluminum is 20% to 65%. , in a vacuum and / or protective gas atmosphere, metal scandium is first melted, and then metal aluminum is gradually added to metal scandium in stages, smelted several times, and cooled to obtain an aluminum-scandium alloy. Among them, the metal aluminum is divided into multiple parts, and each time a part of the metal aluminum is added, it is smelted and kept for about 10 minutes, and then...

Embodiment 1

[0035]Select 820g of metal aluminum with a purity of 99.99% and 455.3g of metal scandium with a purity of 99.9%. In a protective gas atmosphere, first melt the metal scandium, then gradually add the metal aluminum to the metal scandium, and smelt and cool for many times to obtain An aluminum-scandium alloy with a scandium content of 35.7%; the aluminum-scandium alloy is ball-milled in alcohol for 2 hours, and then vacuum-dried to obtain an alloy powder with a thickness of less than 300 μm. Stir the alloy powder and lubricant in a mixer, put it into a mold with a diameter of 200mm, and hold the pressure for 5 minutes under a hydraulic press at 35KN to obtain an aluminum-scandium alloy green body. The green body was vacuum sintered at 850° C. for 60 minutes to obtain an aluminum-scandium alloy target body. The target blank obtained by sintering is subjected to thermal deformation processing. Firstly, it is forged after holding at 700°C for 45 minutes. The deformation amount does...

Embodiment 2

[0037] Select 800g of metal aluminum with a purity of 99.99% and 665.2g of metal scandium with a purity of 99.9%. In a protective gas atmosphere, first melt the metal scandium, then gradually add the metal aluminum to the metal scandium, and smelt and cool for many times to obtain An aluminum-scandium alloy with a scandium content of 45.4%; the aluminum-scandium alloy is ball-milled in alcohol for 2 hours, and then vacuum-dried to obtain an alloy powder with a thickness of less than 300 μm. Stir the alloy powder and lubricant in a mixer, put it into a mold with a diameter of 250mm, and hold the pressure for 5 minutes under a hydraulic press at 35KN to obtain an aluminum-scandium alloy green body. The green body was vacuum sintered at 1050°C for 120 minutes to obtain an aluminum-scandium alloy target blank. The target blank obtained by sintering is subjected to hot deformation processing. Firstly, it is forged at 750°C for 30 minutes, and the deformation amount does not exceed ...

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Abstract

The invention discloses an aluminum-scandium alloy target with high scandium content and a preparation method thereof. The method comprises the steps of selecting metal aluminum and metal scandium, and carrying out proportioning; melting the metal scandium, then adding the metal aluminum into the metal scandium for smelting step by step in multiple times, and carrying out cooling after melting inmultiple times to obtain an aluminum-scandium alloy; performing ball milling and vacuum drying on the aluminum-scandium alloy to obtain alloy powder, and then performing pre-pressing and vacuum sintering to obtain an aluminum-scandium alloy target blank; and performing hot deformation machining on the obtained aluminum-scandium alloy target blank to obtain the aluminum-scandium alloy target, wherein the hot deformation machining comprises hot forging, hot rolling and finish machining. By adopting the method, the aluminum-scandium alloy target is more uniform in structure and chemical composition, higher in relative density which is 99.0% or more, finer in grain size and higher in ductility; by adopting the method, the defects of shrinkage cavities and porosity are also reduced; the raw material cost is saved; the problems of large alloy brittleness and incapability of target machining are solved; and the requirements of wiring materials for large-scale integrated circuits can be met.

Description

technical field [0001] The invention relates to the technical field of aluminum alloy target processing and preparation, in particular to an aluminum-scandium alloy target with high scandium content and a preparation method thereof. Background technique [0002] Thin film materials are the key support for the manufacture of electronic devices. Among them, aluminum thin films have become key materials in the fields of integrated circuits, discrete devices, and liquid crystal displays due to their advantages such as low resistivity, easy deposition, easy etching, and mature technology. With the development of electronic information technology in the direction of high performance, multi-function, large capacity, and miniaturization, the integration of semiconductor chips is getting higher and higher, and the width of integrated circuit metal interconnection lines is continuously decreasing. The problem of migration and stress migration is prominent, which can no longer meet the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34B22F3/02B22F3/10B22F3/17B22F3/18B22F3/24C22C21/00C22C28/00
CPCC23C14/3414B22F3/02B22F3/1007B22F3/24B22F3/17B22F3/18C22C21/00C22C28/00B22F2003/248C22C1/026C22C1/0416C22F1/04B22F9/04B22F2009/043B22F2998/10B22F2003/185B22F2003/247B22F2003/175
Inventor 刘华黄美松樊玉川王志坚贾帅广傅臻姚茂海杨露辉
Owner HUNAN RARE EARTH METAL MATERIAL RES INST
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