Aluminum-scandium alloy target with high scandium content and preparation method thereof
An alloy target, aluminum scandium technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, can solve the problems of easy oxidation of metal scandium powder and aluminum powder, affecting the purity of products, limitation of use scope, etc. High ductility, wide composition range, fine grain size effect
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[0025] A preferred embodiment of the present invention provides a method for preparing an aluminum-scandium alloy target with high scandium content. The method includes the steps of alloying smelting, powder making, pre-pressing, vacuum sintering, hot forging, hot rolling and machining. Specifically, include the following steps:
[0026] (1) Alloying smelting: select metal aluminum with a purity of 99.99% or more and metal scandium with a purity of 99.9% or more, and the mass percentage content of metal scandium is 35% to 80%, and the mass percentage content of metal aluminum is 20% to 65%. , in a vacuum and / or protective gas atmosphere, metal scandium is first melted, and then metal aluminum is gradually added to metal scandium in stages, smelted several times, and cooled to obtain an aluminum-scandium alloy. Among them, the metal aluminum is divided into multiple parts, and each time a part of the metal aluminum is added, it is smelted and kept for about 10 minutes, and then...
Embodiment 1
[0035]Select 820g of metal aluminum with a purity of 99.99% and 455.3g of metal scandium with a purity of 99.9%. In a protective gas atmosphere, first melt the metal scandium, then gradually add the metal aluminum to the metal scandium, and smelt and cool for many times to obtain An aluminum-scandium alloy with a scandium content of 35.7%; the aluminum-scandium alloy is ball-milled in alcohol for 2 hours, and then vacuum-dried to obtain an alloy powder with a thickness of less than 300 μm. Stir the alloy powder and lubricant in a mixer, put it into a mold with a diameter of 200mm, and hold the pressure for 5 minutes under a hydraulic press at 35KN to obtain an aluminum-scandium alloy green body. The green body was vacuum sintered at 850° C. for 60 minutes to obtain an aluminum-scandium alloy target body. The target blank obtained by sintering is subjected to thermal deformation processing. Firstly, it is forged after holding at 700°C for 45 minutes. The deformation amount does...
Embodiment 2
[0037] Select 800g of metal aluminum with a purity of 99.99% and 665.2g of metal scandium with a purity of 99.9%. In a protective gas atmosphere, first melt the metal scandium, then gradually add the metal aluminum to the metal scandium, and smelt and cool for many times to obtain An aluminum-scandium alloy with a scandium content of 45.4%; the aluminum-scandium alloy is ball-milled in alcohol for 2 hours, and then vacuum-dried to obtain an alloy powder with a thickness of less than 300 μm. Stir the alloy powder and lubricant in a mixer, put it into a mold with a diameter of 250mm, and hold the pressure for 5 minutes under a hydraulic press at 35KN to obtain an aluminum-scandium alloy green body. The green body was vacuum sintered at 1050°C for 120 minutes to obtain an aluminum-scandium alloy target blank. The target blank obtained by sintering is subjected to hot deformation processing. Firstly, it is forged at 750°C for 30 minutes, and the deformation amount does not exceed ...
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