Pellicle frame body for flat panel display (FPD) and manufacturing method therefor

A manufacturing method and technology of protective film, applied in the direction of manufacturing tools, instruments, and originals for photomechanical processing, etc., can solve problems such as difficulties, achieve high dimensional accuracy and flatness, expand internal dimensions, and suppress pore defects.

Pending Publication Date: 2020-07-24
NIPPON LIGHT METAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The pellicle frame is required not only to have high dimensional accuracy and flatness, but also to have strength that does not deform due to the tension of the pellicle, and it becomes difficult to meet these requirements as the pellicle frame increases in size

Method used

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  • Pellicle frame body for flat panel display (FPD) and manufacturing method therefor
  • Pellicle frame body for flat panel display (FPD) and manufacturing method therefor
  • Pellicle frame body for flat panel display (FPD) and manufacturing method therefor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0091] [Example]

[0092] After performing CIP molding on an aluminum alloy powder having a composition of Si: 27%, Fe: 0.25%, Cu: 0.25%, Mg: 0.7%, and Cr: 0.15%, it was held in a vacuum atmosphere at 565°C for 4 hours. Sintered and molded to a bulk density of 2.3g / cm 3 A cylindrical shape with an outer diameter of 250 mm (the first step). In addition, the particle size of the aluminum alloy powder used as a raw material is such that 93% thereof is smaller than 150 μm (Ro-Tap method).

[0093] Then, hot extrusion is performed on the obtained sintered body as a billet for hot extrusion. Specifically, the billet was heated at 450° C., inserted into a cavity of a 10-inch extruder, and extruded to obtain a plate-shaped extruded product with a width of 100 mm and a thickness of 8 mm (second step).

[0094] Then, configure the four extrusions as Figure 4 state shown, the extrusions are friction stir joined to each other, thus obtaining Figure 5 Frame shown (third process). I...

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Abstract

Provided are: a pellicle frame body for a flat panel display (FPD) having high dimensional accuracy and flatness, the pellicle frame body being capable of maintaining the rigidity required for a pellicle for a large flat panel display (FPD) even if the cross-sectional area of the frame is reduced, and enlarging the inside dimension of the frame body by reducing the cross-sectional area; and an efficient manufacturing method therefor. The present invention provides a pellicle frame body for a flat panel display (FPD), the pellicle frame body being characterized by being composed of an extrudedmaterial of an aluminum alloy powder sintered body comprising 20-40 mass% of Si, 0.2-1.2 mass% of Mg, 2 mass% or less of Cu, 2 mass% or less of Fe, 0.4 mass% or less of Cr, and the balance comprisingAl and inevitable impurities.

Description

technical field [0001] The present invention relates to a frame of a pellicle (pellicle) for preventing foreign matter from adhering to a photomask or a photomask used in a photolithography process in the manufacture of an FPD (Flat Panel Display), and particularly to a large FPD (Flat Panel Display) Display) protective film frame and manufacturing method thereof. Background technique [0002] Semiconductor devices such as LSI and super LSI or FPD (Flat Panel Display) panels are patterned by irradiating light on a semiconductor wafer or FPD (Flat Panel Display) original plate (patterning by photolithography). However, in the case of using an exposure original plate to which dust adheres, the dust absorbs and / or reverses light, so that the pattern cannot be transferred well (for example, deformation of the pattern or blurring of the edge occurs). As a result, the quality and appearance of semiconductor devices and FPD (Flat Panel Display) panels are impaired, and performance...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F1/64
CPCG03F1/64C22F1/043C22C1/0416C22C21/02B23K20/122B23K20/129B23K20/2336B23K2101/18B23K2103/10B22F3/20B22F2007/042B22F2998/10B22F2999/00B21C23/002B21C35/023B22F3/10B23K2101/36B22F2301/052G06F1/181
Inventor 饭塚章中野耕一古村直人谷津仓政仁冈畠勇斗
Owner NIPPON LIGHT METAL CO LTD
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